Abstract:
The formation of a fluoropolymer coating by chemical deposition has been studied. It has been found that increasing the flow rate of the precursor gas leads to a decrease in the growth rate of the coating. The conditions deposition was analyzed, and the gas dynamic parameters of the process were estimated. It is shown that the estimates are consistent with experimental data.
Citation:
A. I. Safonov, V. S. Sulyaeva, A. L. Bogoslovtseva, N. I. Timoshenko, “Effect of the flow rate of the precursor gas on the growth rate of a fluoropolymer coating during hot wire chemical vapor deposition”, Prikl. Mekh. Tekh. Fiz., 59:5 (2018), 87–92; J. Appl. Mech. Tech. Phys., 59:5 (2019), 842–846
\Bibitem{SafSulBog18}
\by A.~I.~Safonov, V.~S.~Sulyaeva, A.~L.~Bogoslovtseva, N.~I.~Timoshenko
\paper Effect of the flow rate of the precursor gas on the growth rate of a fluoropolymer coating during hot wire chemical vapor deposition
\jour Prikl. Mekh. Tekh. Fiz.
\yr 2018
\vol 59
\issue 5
\pages 87--92
\mathnet{http://mi.mathnet.ru/pmtf527}
\crossref{https://doi.org/10.15372/PMTF20180510}
\elib{https://elibrary.ru/item.asp?id=35606604}
\transl
\jour J. Appl. Mech. Tech. Phys.
\yr 2019
\vol 59
\issue 5
\pages 842--846
\crossref{https://doi.org/10.1134/S0021894418050103}
Linking options:
https://www.mathnet.ru/eng/pmtf527
https://www.mathnet.ru/eng/pmtf/v59/i5/p87
This publication is cited in the following 3 articles:
Mehmet GÜRSOY, “PECVD YÖNTEMİ İLE TOHUMLARIN HİDROFOBİK İNCE FİLMLE ENKAPSÜLASYONU”, Konya Journal of Engineering Sciences, 9 (2021), 1
A. S. Surtaev, V. S. Serdyukov, I. P. Malakhov, “Features of Boiling Heat Transfer at Various
Pressures on Hydrophilic/Hydrophobic Surfaces”, J. Engin. Thermophys., 29:4 (2020), 582
A I Safonov, D Y Panin, N I Timoshenko, “Temperature distribution of gas flows in a grid area activated by chemical vapor deposition”, J. Phys.: Conf. Ser., 1382:1 (2019), 012167
Citation in format AMSBIB
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