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Prikladnaya Mekhanika i Tekhnicheskaya Fizika, 2018, Volume 59, Issue 5, Pages 5–12
DOI: https://doi.org/10.15372/PMTF20180501 (Mi pmtf518) 		 
This article is cited in 12 scientific papers (total in 12 papers)

Synthesis of diamonds from the microwave plasma with the use of supersonic gas flows

A. K. Rebrova, M. V. Isupova, A. Yu. Litvintzeva, V. F. Burovb

a S.S. Kutateladze Institute of Thermophysics, Siberian Division of the Russian Academy of Sciences, Novosibirsk, 630090, Russia
b Joint-Stock Company "ZiO-KOTES", 630049, Novosibirsk, Russia
Full-text PDF (460 kB) Citations (12)
DOI: https://doi.org/10.15372/PMTF20180501
Abstract: A new method of deposition of diamond films with the use of supersonic gas flows activated by a superhigh-frequency discharge is implemented for the first time. The operation principle of the proposed gas-discharge system is similar to that of a microwave electrothermal rocket engine. A mixture of hydrocarbons and hydrogen is used as a plasma-forming gas. It is demonstrated that the proposed method allows the plasma-forming gas to be used at pressures far above the upper limit of the working pressures of modern gas-discharge devices of film deposition in the plasma generated by a superhigh-frequency discharge (approximately 40000 Pa).
Keywords: diamond synthesis, microwave plasma, resonance chamber, nozzle, hydrogen–methane mixture, high-velocity flow, vacuum.
Funding agency Grant number
Siberian Branch of Russian Academy of Sciences 47
Received: 03.07.2018
English version:
Journal of Applied Mechanics and Technical Physics, 2018, Volume 59, Issue 5, Pages 771–777
DOI: https://doi.org/10.1134/S0021894418050012
Bibliographic databases:
Document Type: Article
UDC: 533.9.07
Language: Russian
Citation: A. K. Rebrov, M. V. Isupov, A. Yu. Litvintzev, V. F. Burov, “Synthesis of diamonds from the microwave plasma with the use of supersonic gas flows”, Prikl. Mekh. Tekh. Fiz., 59:5 (2018), 5–12; J. Appl. Mech. Tech. Phys., 59:5 (2018), 771–777
Citation in format AMSBIB
\Bibitem{RebIsuLit18}
\by A.~K.~Rebrov, M.~V.~Isupov, A.~Yu.~Litvintzev, V.~F.~Burov
\paper Synthesis of diamonds from the microwave plasma with the use of supersonic gas flows
\jour Prikl. Mekh. Tekh. Fiz.
\yr 2018
\vol 59
\issue 5
\pages 5--12
\mathnet{http://mi.mathnet.ru/pmtf518}
\crossref{https://doi.org/10.15372/PMTF20180501}
\elib{https://elibrary.ru/item.asp?id=35606595}
\transl
\jour J. Appl. Mech. Tech. Phys.
\yr 2018
\vol 59
\issue 5
\pages 771--777
\crossref{https://doi.org/10.1134/S0021894418050012}
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    • This publication is cited in the following 12 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Prikladnaya Mekhanika i Tekhnicheskaya Fizika Prikladnaya Mekhanika i Tekhnicheskaya Fizika
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