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Prikladnaya Mekhanika i Tekhnicheskaya Fizika, 1994, Volume 35, Issue 1, Pages 13–21
(Mi pmtf3743)
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This article is cited in 2 scientific papers (total in 2 papers)
Modeling of a monosilane RF-discharge plasma
V. A. Schweigert, M. I. Zhilyaev, I. V. Shveigert Novosibirsk
Received: 03.03.1993
Citation:
V. A. Schweigert, M. I. Zhilyaev, I. V. Shveigert, “Modeling of a monosilane RF-discharge plasma”, Prikl. Mekh. Tekh. Fiz., 35:1 (1994), 13–21; J. Appl. Mech. Tech. Phys., 35:1 (1994), 13–20
Linking options:
https://www.mathnet.ru/eng/pmtf3743 https://www.mathnet.ru/eng/pmtf/v35/i1/p13
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Abstract page: | 16 | Full-text PDF : | 8 |
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