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Prikladnaya Mekhanika i Tekhnicheskaya Fizika, 1994, Volume 35, Issue 1, Pages 13–21 (Mi pmtf3743)  
This article is cited in 2 scientific papers (total in 2 papers)

Modeling of a monosilane RF-discharge plasma

V. A. Schweigert, M. I. Zhilyaev, I. V. Shveigert

Novosibirsk
Full-text PDF (881 kB) Citations (2)
Received: 03.03.1993
English version:
Journal of Applied Mechanics and Technical Physics, 1994, Volume 35, Issue 1, Pages 13–20
DOI: https://doi.org/10.1007/BF02369744
Document Type: Article
UDC: 537.525
Language: Russian
Citation: V. A. Schweigert, M. I. Zhilyaev, I. V. Shveigert, “Modeling of a monosilane RF-discharge plasma”, Prikl. Mekh. Tekh. Fiz., 35:1 (1994), 13–21; J. Appl. Mech. Tech. Phys., 35:1 (1994), 13–20
Citation in format AMSBIB
\Bibitem{SchZhiShv94}
\by V.~A.~Schweigert, M.~I.~Zhilyaev, I.~V.~Shveigert
\paper Modeling of a monosilane RF-discharge plasma
\jour Prikl. Mekh. Tekh. Fiz.
\yr 1994
\vol 35
\issue 1
\pages 13--21
\mathnet{http://mi.mathnet.ru/pmtf3743}
\transl
\jour J. Appl. Mech. Tech. Phys.
\yr 1994
\vol 35
\issue 1
\pages 13--20
\crossref{https://doi.org/10.1007/BF02369744}
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  • https://www.mathnet.ru/eng/pmtf/v35/i1/p13
    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Prikladnaya Mekhanika i Tekhnicheskaya Fizika Prikladnaya Mekhanika i Tekhnicheskaya Fizika
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