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Prikladnaya Mekhanika i Tekhnicheskaya Fizika, 2007, Volume 48, Issue 1, Pages 3–10 (Mi pmtf1988)  

This article is cited in 3 scientific papers (total in 3 papers)

Gas flow activated in an electron-beam plasma

V. O. Konstantinov, S. Ya. Khmel'

Kutateladze Institute of Thermophysics, Siberian Division, Russian Academy of Sciences, Novosibirsk, 630090
Full-text PDF (243 kB) Citations (3)
Abstract: Probe measurements of electron temperature and density, electron energy distribution functions, and plasma potential in a free gas jet activated in an electron-beam plasma and in a planar reactor are presented. The measurements are performed by single, double, and triple electrostatic probes in jets of helium-argon and helium-argon-monosilane gas mixtures. The latter mixture is used to deposit films of microcrystalline and epitaxial silicon. Microcrystalline silicon films of higher quality are obtained in a dense ($n_e\approx10^{17}$ m$^{-3}$) and cold ($T_e\approx 1.0-0.5$ eV) plasma with a low potential ($U_{sp}\approx10$ V), whereas the growth of monocrystalline silicon films requires a hotter plasma ($T_e\approx3-5$ eV) with a potential $U_{sp}\approx15$ V.
Keywords: probe diagnostics, electron-beam plasma, chemical vapor deposition of thin silicon films.
Received: 24.11.2005
Accepted: 31.03.2006
English version:
Journal of Applied Mechanics and Technical Physics, 2007, Volume 48, Issue 1, Pages 1–6
DOI: https://doi.org/10.1007/s10808-007-0001-3
Bibliographic databases:
Document Type: Article
UDC: 533.9:621.039.66, 539.23+546.28
Language: Russian
Citation: V. O. Konstantinov, S. Ya. Khmel', “Gas flow activated in an electron-beam plasma”, Prikl. Mekh. Tekh. Fiz., 48:1 (2007), 3–10; J. Appl. Mech. Tech. Phys., 48:1 (2007), 1–6
Citation in format AMSBIB
\Bibitem{KonKhm07}
\by V.~O.~Konstantinov, S.~Ya.~Khmel'
\paper Gas flow activated in an electron-beam plasma
\jour Prikl. Mekh. Tekh. Fiz.
\yr 2007
\vol 48
\issue 1
\pages 3--10
\mathnet{http://mi.mathnet.ru/pmtf1988}
\elib{https://elibrary.ru/item.asp?id=17249392}
\transl
\jour J. Appl. Mech. Tech. Phys.
\yr 2007
\vol 48
\issue 1
\pages 1--6
\crossref{https://doi.org/10.1007/s10808-007-0001-3}
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  • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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