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Prikladnaya Mekhanika i Tekhnicheskaya Fizika, 2023, Volume 64, Issue 3, Pages 131–136
DOI: https://doi.org/10.15372/PMTF202215179 (Mi pmtf1312) 		 
This article is cited in 2 scientific papers (total in 2 papers)

Silicon surface structuring by glow discharge plasma

A. V. Petrovaab, A. L. Bogoslovtsevaab, S. V. Starinskiyab, A. I. Safonova

a S.S. Kutateladze Institute of Thermophysics, Siberian Division of the Russian Academy of Sciences, Novosibirsk, Russia
b Novosibirsk State University, Novosibirsk, Russia
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DOI: https://doi.org/10.15372/PMTF202215179
Abstract: The possibility of changing the morphology of the silicon surface at certain parameters of the glow discharge is shown. It has been established that oxidation is the main process influencing the surface morphology during glow discharge plasma treatment. As a result of processing in the investigated range of parameters, various stages of the surface oxidation process are observed: the formation of a uniform oxide layer, the formation of nano- and microstructures of silicon oxide. It is shown that these processes lead to surface modification, which acquires stable hydrophilic and superhydrophilic properties.
Keywords: glow discharge, silicon processing, oxidation, wettability, hydrophilicity.
Funding agency Grant number
Russian Science Foundation 18-79-10119-П
Received: 22.07.2022
Revised: 07.11.2022
Accepted: 28.11.2022
English version:
Journal of Applied Mechanics and Technical Physics, 2023, Volume 64, Issue 3, Pages 472–477
DOI: https://doi.org/10.1134/S0021894423030136
Bibliographic databases:
Document Type: Article
UDC: 533.17: 541.64
Language: Russian
Citation: A. V. Petrova, A. L. Bogoslovtseva, S. V. Starinskiy, A. I. Safonov, “Silicon surface structuring by glow discharge plasma”, Prikl. Mekh. Tekh. Fiz., 64:3 (2023), 131–136; J. Appl. Mech. Tech. Phys., 64:3 (2023), 472–477
Citation in format AMSBIB
\Bibitem{PetBogSta23}
\by A.~V.~Petrova, A.~L.~Bogoslovtseva, S.~V.~Starinskiy, A.~I.~Safonov
\paper Silicon surface structuring by glow discharge plasma
\jour Prikl. Mekh. Tekh. Fiz.
\yr 2023
\vol 64
\issue 3
\pages 131--136
\mathnet{http://mi.mathnet.ru/pmtf1312}
\crossref{https://doi.org/10.15372/PMTF202215179}
\elib{https://elibrary.ru/item.asp?id=53804236}
\transl
\jour J. Appl. Mech. Tech. Phys.
\yr 2023
\vol 64
\issue 3
\pages 472--477
\crossref{https://doi.org/10.1134/S0021894423030136}
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  • https://www.mathnet.ru/eng/pmtf/v64/i3/p131
    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Prikladnaya Mekhanika i Tekhnicheskaya Fizika Prikladnaya Mekhanika i Tekhnicheskaya Fizika
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    References:14
    First page:6
     
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