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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1985, Volume 11, Issue 17, Pages 1048–1053 (Mi pjtf979)  
High-voltage electron lithography through the pattern former

K. A. Valiev, L. V. Velikov, R. Kh. Makhmutov, A. M. Prokhorov

General Physics Institute of the Academy of Sciences of the USSR, Moscow
Full-text PDF (3693 kB)
Received: 20.06.1985
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: K. A. Valiev, L. V. Velikov, R. Kh. Makhmutov, A. M. Prokhorov, “High-voltage electron lithography through the pattern former”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:17 (1985), 1048–1053
Citation in format AMSBIB
\Bibitem{ValVelMak85}
\by K.~A.~Valiev, L.~V.~Velikov, R.~Kh.~Makhmutov, A.~M.~Prokhorov
\paper High-voltage electron lithography through the pattern former
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 1985
\vol 11
\issue 17
\pages 1048--1053
\mathnet{http://mi.mathnet.ru/pjtf979}
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