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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1985, Volume 11, Issue 17, Pages 1025–1030
(Mi pjtf974)
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Nanosecond single-pulsive laser lithography
A. L. Bogdanov, K. A. Valiev, L. V. Velikov, D. Yu. Zaroslov, A. M. Prokhorov General Physics Institute of the Academy of Sciences of the USSR, Moscow
Received: 12.06.1985
Citation:
A. L. Bogdanov, K. A. Valiev, L. V. Velikov, D. Yu. Zaroslov, A. M. Prokhorov, “Nanosecond single-pulsive laser lithography”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:17 (1985), 1025–1030
Linking options:
https://www.mathnet.ru/eng/pjtf974 https://www.mathnet.ru/eng/pjtf/v11/i17/p1025
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