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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1985, Volume 11, Issue 13, Pages 794–799 (Mi pjtf919)  
Numerical modeling of $Ga\,As$ film growth in flow gas-epitaxial reactors

A. I. Zhmakin, I. P. Ipatova, Yu. N. Makarov, A. A. Fursenko

Ioffe Physico-Technical Institute USSR Academy of Sciences, Leningrad
Full-text PDF (440 kB)
Received: 30.04.1985
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. I. Zhmakin, I. P. Ipatova, Yu. N. Makarov, A. A. Fursenko, “Numerical modeling of $Ga\,As$ film growth in flow gas-epitaxial reactors”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:13 (1985), 794–799
Citation in format AMSBIB
\Bibitem{ZhmIpaMak85}
\by A.~I.~Zhmakin, I.~P.~Ipatova, Yu.~N.~Makarov, A.~A.~Fursenko
\paper Numerical modeling of $Ga\,As$ film growth in flow gas-epitaxial reactors
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 1985
\vol 11
\issue 13
\pages 794--799
\mathnet{http://mi.mathnet.ru/pjtf919}
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  • https://www.mathnet.ru/eng/pjtf/v11/i13/p794
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