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Pisma v Zhurnal Tekhnicheskoi Fiziki, 1985, Volume 11, Issue 3, Pages 144–148 (Mi pjtf764)  
Laser-radiated selective etching of chromium thin-films

V. P. Koronkevich, A. G. Poleshchuk, E. G. Churin, Yu. I. Yurlov

Institute of Automation and Electrometry, Siberian Branch of Russian Academy of Sciences, Novosibirsk
Full-text PDF (3427 kB)
Received: 27.06.1984
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. P. Koronkevich, A. G. Poleshchuk, E. G. Churin, Yu. I. Yurlov, “Laser-radiated selective etching of chromium thin-films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 11:3 (1985), 144–148
Citation in format AMSBIB
\Bibitem{KorPolChu85}
\by V.~P.~Koronkevich, A.~G.~Poleshchuk, E.~G.~Churin, Yu.~I.~Yurlov
\paper Laser-radiated selective etching of chromium thin-films
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 1985
\vol 11
\issue 3
\pages 144--148
\mathnet{http://mi.mathnet.ru/pjtf764}
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  • https://www.mathnet.ru/eng/pjtf/v11/i3/p144
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