|
This article is cited in 1 scientific paper (total in 1 paper)
Effect of the algaas seed layer composition on antiphase domains formation in (Al)GaAs structures grown by vapor-phase epitaxy on Ge/Si(100) substrates
A. V. Rykova, R. N. Kriukova, I. V. Samartseva, P. A. Yuninb, V. G. Shengurova, A. V. Zaitseva, N. V. Baidusa a Scientific-Research Physicotechnical Institute at the Nizhnii Novgorod State University, Nizhnii Novgorod
b Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
Abstract:
GaAs-based heterostructures grown by metalorganic vapor-phase epitaxy on virtual Ge/Si substrates using Al$_x$Ga$_{1-x}$As seed layers with different aluminum contents $x$ in solid solution have been investigated. The influence of the $x$ value on the density and sizes of antiphase domains, outcropping onto the sample surface, and optical properties of the GaAs layer is demonstrated. The heterostructures have been grown on (100) substrates with small random off-cut from the nominal crystallographic orientation (0.7$^\circ$ towards [110]).
Keywords:
heteroepitaxy, III–V on silicon, antiphase defects, photoluminescence.
Received: 23.12.2020 Revised: 13.01.2021 Accepted: 17.01.2021
Citation:
A. V. Rykov, R. N. Kriukov, I. V. Samartsev, P. A. Yunin, V. G. Shengurov, A. V. Zaitsev, N. V. Baidus, “Effect of the algaas seed layer composition on antiphase domains formation in (Al)GaAs structures grown by vapor-phase epitaxy on Ge/Si(100) substrates”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:8 (2021), 37–40; Tech. Phys. Lett., 47:5 (2021), 413–416
Linking options:
https://www.mathnet.ru/eng/pjtf6565 https://www.mathnet.ru/eng/pjtf/v47/i8/p37
|
Statistics & downloads: |
Abstract page: | 61 | Full-text PDF : | 32 |
|