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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2021, Volume 47, Issue 8, Pages 25–28
DOI: https://doi.org/10.21883/PJTF.2021.08.50849.18657 (Mi pjtf6562) 		 
This article is cited in 3 scientific papers (total in 3 papers)

Energy distributions of secondary charged particles sputtered by gas cluster ions

A. E. Ieshkinab, A. A. Tatarintseva, D. S. Kireeva, V. I. Bachurinb, A. S. Rudyib

a Lomonosov Moscow State University
b P.G. Demidov Yaroslavl State University
Full-text PDF (262 kB) Citations (3)
DOI: https://doi.org/10.21883/PJTF.2021.08.50849.18657
Abstract: Energy spectra of charged particles emitted from a polycrystalline copper target bombarded with argon and xenon cluster ions have been experimentally studied. Positive particles sputtered with gas cluster ions possess significantly lower energies than do particles sputtered with atomic argon. The spectra of charged particles emitted under bombardment with xenon cluster ions are systematically narrower than analogous spectra obtained under bombardment with argon clusters. The discovered laws can be explained from the standpoint of features of energy transfer from the cluster ion to the target.
Keywords: cluster ions, sputtering, ion–electron emission, energy distribution.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 0856-2020-0006
This work was supported in part by the Ministry of Science and Higher Education of the Russian Federation in the framework of a state order to P.G. Demidov Yaroslavl State University, project no. 0856-2020-0006.
Received: 16.12.2020
Revised: 08.01.2021
Accepted: 11.01.2021
English version:
Technical Physics Letters, 2021, Volume 47, Issue 5, Pages 381–384
DOI: https://doi.org/10.1134/S1063785021040192
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. E. Ieshkin, A. A. Tatarintsev, D. S. Kireev, V. I. Bachurin, A. S. Rudyi, “Energy distributions of secondary charged particles sputtered by gas cluster ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 47:8 (2021), 25–28; Tech. Phys. Lett., 47:5 (2021), 381–384
Citation in format AMSBIB
\Bibitem{IesTatKir21}
\by A.~E.~Ieshkin, A.~A.~Tatarintsev, D.~S.~Kireev, V.~I.~Bachurin, A.~S.~Rudyi
\paper Energy distributions of secondary charged particles sputtered by gas cluster ions
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2021
\vol 47
\issue 8
\pages 25--28
\mathnet{http://mi.mathnet.ru/pjtf6562}
\crossref{https://doi.org/10.21883/PJTF.2021.08.50849.18657}
\elib{https://elibrary.ru/item.asp?id=46333408}
\transl
\jour Tech. Phys. Lett.
\yr 2021
\vol 47
\issue 5
\pages 381--384
\crossref{https://doi.org/10.1134/S1063785021040192}
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    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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