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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 42, Issue 3, Pages 106–110 (Mi pjtf6525)  
This article is cited in 52 scientific papers (total in 52 papers)

Microprofile formation by thermal oxidation of molybdenum films

N. L. Kazanskiiab, O. Yu. Moiseeva, S. D. Poletayevab

a Image Processing Systems Institute, Russian Academy of Sciences, Samara
b Samara State Aerospace University
Full-text PDF (95 kB) Citations (52)
Abstract: The possibility of forming a microprofile in diffractive optical elements by thermal oxidation of thin molybdenum films is analyzed. It is shown that the gain in the thickness of a starting film in the thermal oxidation process may reach a threefold value, with the optical quality of the surface preserved.
Keywords: Technical Physic Letter, Thermal Oxidation, High Refractive Index, Molybdenum Oxide, Diffractive Optical Element.
Received: 25.09.2015
English version:
Technical Physics Letters, 2016, Volume 42, Issue 2, Pages 164–166
DOI: https://doi.org/10.1134/S1063785016020085
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: N. L. Kazanskii, O. Yu. Moiseev, S. D. Poletayev, “Microprofile formation by thermal oxidation of molybdenum films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 42:3 (2016), 106–110; Tech. Phys. Lett., 42:2 (2016), 164–166
Citation in format AMSBIB
\Bibitem{KazMoiPol16}
\by N.~L.~Kazanskii, O.~Yu.~Moiseev, S.~D.~Poletayev
\paper Microprofile formation by thermal oxidation of molybdenum films
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2016
\vol 42
\issue 3
\pages 106--110
\mathnet{http://mi.mathnet.ru/pjtf6525}
\elib{https://elibrary.ru/item.asp?id=25669717}
\transl
\jour Tech. Phys. Lett.
\yr 2016
\vol 42
\issue 2
\pages 164--166
\crossref{https://doi.org/10.1134/S1063785016020085}
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    • This publication is cited in the following 52 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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