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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 42, Issue 5, Pages 40–48
(Mi pjtf6487)
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This article is cited in 2 scientific papers (total in 2 papers)
Nonlinear calibration curves in secondary ion mass spectrometry for quantitative analysis of gesi heterostructures with nanoclusters
M. N. Drozdovab, Yu. N. Drozdovab, A. V. Novikovab, P. A. Yuninab, D. V. Yurasovab a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b Lobachevsky State University of Nizhny Novgorod
Abstract:
For the first time in the practice of secondary ion mass spectrometry, we obtained a nonlinear calibration curve for the ratio of the cluster and elementary secondary ions of germanium Ge$_{2}$/Ge without secondary ions of silicon, which enables the quantification of germanium in Ge$_{x}$Si$_{1-x}$ heterostructures in the entire range of 0 $< x\le$ 1. We developed a method for quantitative lateral analysis based on the plotting of a lateral map of $x$. An algorithm to identify and analyze the lateral heterogeneity of $x$ in Ge$_{x}$Si$_{1-x}$ heterostructures with 3D clusters by comparing the results of depth profiling analysis, obtained using linear and nonlinear calibration curves, is developed, and concentration $x$ in the self-assembled nanoislands is determined.
Keywords:
Germanium, Technical Physic Letter, Calibration Equation, Linear Calibration Curve, Lateral Heterogeneity.
Received: 25.09.2015
Citation:
M. N. Drozdov, Yu. N. Drozdov, A. V. Novikov, P. A. Yunin, D. V. Yurasov, “Nonlinear calibration curves in secondary ion mass spectrometry for quantitative analysis of gesi heterostructures with nanoclusters”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 42:5 (2016), 40–48; Tech. Phys. Lett., 42:3 (2016), 243–247
Linking options:
https://www.mathnet.ru/eng/pjtf6487 https://www.mathnet.ru/eng/pjtf/v42/i5/p40
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