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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 42, Issue 8, Pages 61–69 (Mi pjtf6445)  
This article is cited in 2 scientific papers (total in 2 papers)

X-ray diffractometry of AlN/$c$-sapphire templates obtained by plasma-activated molecular beam epitaxy

V. V. Ratnikov, D. V. Nechaev, V. N. Zhmerik, S. V. Ivanov

Ioffe Institute, St. Petersburg
Full-text PDF (313 kB) Citations (2)
Abstract: The structure of AlN/$c$-sapphire templates obtained by plasma-activated molecular beam epitaxy (PAMBE) has been studied by X-ray diffractometry techniques. The results show the advantages of using coarse-grained AlN nucleation layers prepared by high-temperature (780$^\circ$C) adatom-migration-enhanced epitaxy. Using 3.5-nm-thick GaN inserts (obtained by three-dimensional growth under N-rich conditions), it is possible to obtain templates with insignificant residual macrostresses and relatively narrow widths (FWHM) of 0002 and 10$\bar1$5 diffraction reflections.
Keywords: Residual Stress, Technical Physic Letter, Elastic Stress, Seeding Layer, Thread Screw Dislocation.
Received: 26.11.2015
English version:
Technical Physics Letters, 2016, Volume 42, Issue 4, Pages 419–422
DOI: https://doi.org/10.1134/S1063785016040234
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. V. Ratnikov, D. V. Nechaev, V. N. Zhmerik, S. V. Ivanov, “X-ray diffractometry of AlN/$c$-sapphire templates obtained by plasma-activated molecular beam epitaxy”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 42:8 (2016), 61–69; Tech. Phys. Lett., 42:4 (2016), 419–422
Citation in format AMSBIB
\Bibitem{RatNecZhm16}
\by V.~V.~Ratnikov, D.~V.~Nechaev, V.~N.~Zhmerik, S.~V.~Ivanov
\paper X-ray diffractometry of AlN/$c$-sapphire templates obtained by plasma-activated molecular beam epitaxy
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2016
\vol 42
\issue 8
\pages 61--69
\mathnet{http://mi.mathnet.ru/pjtf6445}
\elib{https://elibrary.ru/item.asp?id=27368180}
\transl
\jour Tech. Phys. Lett.
\yr 2016
\vol 42
\issue 4
\pages 419--422
\crossref{https://doi.org/10.1134/S1063785016040234}
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    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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