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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 42, Issue 10, Pages 62–69
(Mi pjtf6417)
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This article is cited in 1 scientific paper (total in 1 paper)
Influence of ion energies on the structure, composition, and properties of multilayer Ti–Al–Si–N ion-plasma-deposited coatings
I. V. Blinkov, A. O. Volkhonskii, D. S. Belov, V. S. Sergevnin, A. V. Chernogor National University of Science and Technology «MISIS», Moscow
Abstract:
It is established that the energy of deposited particles influences the structure, composition, and properties of multilayer nitride coatings consisting of alternating layers of nanocrystalline TiN and amorphous Si$_{3}$N$_{4}$ phases with inclusions of nanocrystalline hexagonal AlN formed at energies of titanium, aluminum, and silicon ions exceeding $\sim$317 $\times$ 10$^{-19}$, 267 $\times$ 10$^{-19}$, and 230 $\times$ 10$^{-19}$ J, respectively. As the energy of titanium ions bombarding the substrate increases above $\sim$512 $\times$ 10$^{-19}$ J, the phase transition from disordered TiN$_{x}$ to Ti$_{3}$N$_{2}$ and the appearance of 2- to 3-nm-thick sublayers in 15-nm-thick nanocrystalline TiN$_{x}$ layers take place in the coating. The maximum hardness of such coatings reaches a level of $\sim$54 GPa.
Received: 02.12.2015
Citation:
I. V. Blinkov, A. O. Volkhonskii, D. S. Belov, V. S. Sergevnin, A. V. Chernogor, “Influence of ion energies on the structure, composition, and properties of multilayer Ti–Al–Si–N ion-plasma-deposited coatings”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 42:10 (2016), 62–69; Tech. Phys. Lett., 42:5 (2016), 528–531
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https://www.mathnet.ru/eng/pjtf6417 https://www.mathnet.ru/eng/pjtf/v42/i10/p62
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