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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 42, Issue 12, Pages 57–63
(Mi pjtf6388)
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This article is cited in 9 scientific papers (total in 9 papers)
Solar-blind Al$_{x}$Ga$_{1-x}$N ($x>$ 0.45) $p$–$i$–$n$ photodiodes with a polarization-$p$-doped emitter
N. V. Kuznetsovaa, D. V. Nechaeva, N. M. Shmidta, S. Yu. Karpovb, N. V. Rzheutskiic, V. E. Zemlyakovd, V. Kh. Kaibysheva, D. Yu. Kazantseva, S. I. Troshkova, V. I. Egorkind, B. Ya. Bera, E. V. Lutsenkoc, S. V. Ivanova, V. N. Zhmerika a Ioffe Institute, St. Petersburg
b Soft-Impact Ltd., Saint-Petersburg
c B. I. Stepanov Institute of Physics, National Academy of Sciences of Belarus, Minsk
d National Research University of Electronic Technology, Zelenograd, Moscow, Russia
Abstract:
Polarization-induced p-type doping of AlGaN layers with high aluminum content during plasmaassisted MBE growth has been studied. It is shown that a gradient of the AlN molar fraction in AlGaN (composition gradient) on a level of 0.005 nm$^{-1}$ must be set in order to obtain a hole concentration of $\sim$10$^{18}$ cm$^{-3}$ (measured by the $C$–$V$ method) in Al$_{x}$Ga$_{1-x}$N:Mg ($x$ = 0.52–0.32) layers with dopant concentration [Mg] = 1.3 $\times$ 10$^{18}$ cm$^{-3}$. $p$–$i$–$n$ photodiodes based on AlGaN heterostructures with such layers as p-emitters showed maximum photoresponsitivity in the solar-blind wavelength range ($\lambda$ = 281 nm) about 35 and 48 mA/W at reverse bias voltage $U$ = 0 and -5 V, respectively, and exhibited a dark current density of 3.9 $\times$ 10$^{-8}$ A/cm$^{2}$ at $U$ = -5 V.
Received: 08.02.2016
Citation:
N. V. Kuznetsova, D. V. Nechaev, N. M. Shmidt, S. Yu. Karpov, N. V. Rzheutskii, V. E. Zemlyakov, V. Kh. Kaibyshev, D. Yu. Kazantsev, S. I. Troshkov, V. I. Egorkin, B. Ya. Ber, E. V. Lutsenko, S. V. Ivanov, V. N. Zhmerik, “Solar-blind Al$_{x}$Ga$_{1-x}$N ($x>$ 0.45) $p$–$i$–$n$ photodiodes with a polarization-$p$-doped emitter”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 42:12 (2016), 57–63; Tech. Phys. Lett., 42:6 (2016), 635–638
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https://www.mathnet.ru/eng/pjtf6388 https://www.mathnet.ru/eng/pjtf/v42/i12/p57
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