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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 42, Issue 15, Pages 1–6 (Mi pjtf6336)  
Mathematical simulation of a membrane capacitive compensation pressure transducer

A. I. Èikhvalda, I. V. Sadkovskayab, T. A. Eikhval’db

a Saint Petersburg State University
b D. I. Mendeleev Institute for Metrology, St. Petersburg, Russia
Full-text PDF (84 kB)
Abstract: The operation of a membrane capacitive pressure transducer with electrostatic compensation of the membrane deformation has been mathematically simulated. It is shown that the theory describing these instruments is incorrect and the error in measuring pressure by them may be as high as 25–29% of the measured value, which makes them inappropriate for use in pressure metrology.
Received: 01.02.2016
English version:
Technical Physics Letters, 2016, Volume 42, Issue 8, Pages 769–771
DOI: https://doi.org/10.1134/S1063785016080071
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. I. Èikhvald, I. V. Sadkovskaya, T. A. Eikhval’d, “Mathematical simulation of a membrane capacitive compensation pressure transducer”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 42:15 (2016), 1–6; Tech. Phys. Lett., 42:8 (2016), 769–771
Citation in format AMSBIB
\Bibitem{EikSadEik16}
\by A.~I.~\`Eikhvald, I.~V.~Sadkovskaya, T.~A.~Eikhval’d
\paper Mathematical simulation of a membrane capacitive compensation pressure transducer
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2016
\vol 42
\issue 15
\pages 1--6
\mathnet{http://mi.mathnet.ru/pjtf6336}
\elib{https://elibrary.ru/item.asp?id=27368273}
\transl
\jour Tech. Phys. Lett.
\yr 2016
\vol 42
\issue 8
\pages 769--771
\crossref{https://doi.org/10.1134/S1063785016080071}
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