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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2016, Volume 42, Issue 16, Pages 34–40 (Mi pjtf6326)  
This article is cited in 11 scientific papers (total in 11 papers)

The diffraction efficiency of echelle gratings increased by ion-beam polishing of groove surfaces

M. V. Zorinaa, S. Yu. Zueva, M. S. Mikhailenkoa, A. E. Pestova, V. N. Polkovnikovab, N. N. Salashchenkoa, N. I. Chkhaloa

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b Lobachevsky State University of Nizhny Novgorod
Full-text PDF (208 kB) Citations (11)
Abstract: The efficiency of first-order diffraction on F1 glass echelle gratings for soft X-ray and extreme UV radiation can be significantly increased (by up to ten times) by etching the groove surface with a beam of neutralized Ar ions at 1250-eV energy. The processing was performed at normal incidence of ion beam on the surface of gratings, and the material thickness removed was on a level of 80–300 nm. A principle of optimization of the ion-beam etching process is proposed for solving particular tasks related to the planarization of microstructures with various lateral dimensions.
Received: 14.04.2016
English version:
Technical Physics Letters, 2016, Volume 42, Issue 8, Pages 844–847
DOI: https://doi.org/10.1134/S1063785016080319
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: M. V. Zorina, S. Yu. Zuev, M. S. Mikhailenko, A. E. Pestov, V. N. Polkovnikov, N. N. Salashchenko, N. I. Chkhalo, “The diffraction efficiency of echelle gratings increased by ion-beam polishing of groove surfaces”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 42:16 (2016), 34–40; Tech. Phys. Lett., 42:8 (2016), 844–847
Citation in format AMSBIB
\Bibitem{ZorZueMik16}
\by M.~V.~Zorina, S.~Yu.~Zuev, M.~S.~Mikhailenko, A.~E.~Pestov, V.~N.~Polkovnikov, N.~N.~Salashchenko, N.~I.~Chkhalo
\paper The diffraction efficiency of echelle gratings increased by ion-beam polishing of groove surfaces
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2016
\vol 42
\issue 16
\pages 34--40
\mathnet{http://mi.mathnet.ru/pjtf6326}
\elib{https://elibrary.ru/item.asp?id=27368293}
\transl
\jour Tech. Phys. Lett.
\yr 2016
\vol 42
\issue 8
\pages 844--847
\crossref{https://doi.org/10.1134/S1063785016080319}
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    • This publication is cited in the following 11 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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