Features of spectra of low-energy neon ions scattered from gallium phosphide

Using mass-resolved ion scattering spectrometry, spectra of Ne$^+$ ions scattered at an angle of 120$^\circ$ from the surface of GaP in the energy range of 0.4–1.96 keV have been studied in detail. In the spectra, in addition to the peaks of elastic binary Ne$^+$/P and Ne$^+$/Ga collisions, the peak of sputtered neon ions has been found, as well as the wide peak (a “hump”), the energy of which slightly depends on the energy of primary ions and the intensity considerably increases with an increase in this energy. In our opinion, the main contribution to this peak is made by neon ions that undergo multiple collisions with gallium and phosphorus atoms on the surface and deeper layers of the sample and keep their charge due to reionization processes.