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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2017, Volume 43, Issue 11, Pages 81–87
DOI: https://doi.org/10.21883/PJTF.2017.11.44700.16710 (Mi pjtf6216) 		 
A holographic method of the quantitative measurement of photolithographic replicas of thick raised surface defects

N. S. Budnikova, V. V. Dudenkovaa, V. E. Kotominaa, O. A. Morozova, V. V. Semenovb

a Lobachevsky State University of Nizhny Novgorod
b G. A. Razuvaev Institute of Organometallic Chemistry, Russian Academy of Sciences, Nizhnii Novgorod
Full-text PDF (259 kB)
DOI: https://doi.org/10.21883/PJTF.2017.11.44700.16710
Abstract: To solve the problem of the evaluation of the characteristic sizes and patterns of surface microdefects of complex-shaped samples, a holographic method for the measurement of transparent replicas representing an inverse impression of the investigated surface is proposed. This measurement method is based on the digital registration of the interferograms of a polymeric replica in the modified off-axis Leith–Upatnieks holographic scheme and on the calculation of the phase-incursion difference from a series of reconstructed digital holograms.
Received: 20.01.2017
English version:
Technical Physics Letters, 2017, Volume 43, Issue 6, Pages 539–541
DOI: https://doi.org/10.1134/S1063785017060050
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: N. S. Budnikov, V. V. Dudenkova, V. E. Kotomina, O. A. Morozov, V. V. Semenov, “A holographic method of the quantitative measurement of photolithographic replicas of thick raised surface defects”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 43:11 (2017), 81–87; Tech. Phys. Lett., 43:6 (2017), 539–541
Citation in format AMSBIB
\Bibitem{BudDudKot17}
\by N.~S.~Budnikov, V.~V.~Dudenkova, V.~E.~Kotomina, O.~A.~Morozov, V.~V.~Semenov
\paper A holographic method of the quantitative measurement of photolithographic replicas of thick raised surface defects
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2017
\vol 43
\issue 11
\pages 81--87
\mathnet{http://mi.mathnet.ru/pjtf6216}
\crossref{https://doi.org/10.21883/PJTF.2017.11.44700.16710}
\elib{https://elibrary.ru/item.asp?id=29359306}
\transl
\jour Tech. Phys. Lett.
\yr 2017
\vol 43
\issue 6
\pages 539--541
\crossref{https://doi.org/10.1134/S1063785017060050}
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