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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2017, Volume 43, Issue 16, Pages 87–92
DOI: https://doi.org/10.21883/PJTF.2017.16.44937.16852 (Mi pjtf6151) 		 
This article is cited in 9 scientific papers (total in 9 papers)

Formation of hexagonal 9$R$ silicon polytype by ion implantation

D. S. Koroleva, A. A. Nikolskayaa, N. O. Krivulina, A. I. Belova, A. N. Mikhaylova, D. A. Pavlova, D. I. Tetelbauma, N. A. Sobolevb, M. Kumarc

a Lobachevsky State University of Nizhny Novgorod
b Ioffe Institute, St. Petersburg
c Indian Institute of Technology Jodhpur, Jodhpur, India
Full-text PDF (372 kB) Citations (9)
DOI: https://doi.org/10.21883/PJTF.2017.16.44937.16852
Abstract: Transmission electron-microscopy examination revealed the appearance of a hexagonal silicon (9$R$ polytype) inclusions in the subsrface silicon layer upon ion implantation and subsequent heat treatment of the SiO$_2$/Si structure. The formation of this hexagonal phase is stimulated by mechanical stresses arising in the heterophase system in the course of ion implantation.
Received: 03.05.2017
English version:
Technical Physics Letters, 2017, Volume 43, Issue 8, Pages 767–769
DOI: https://doi.org/10.1134/S1063785017080211
Document Type: Article
Language: Russian
Citation: D. S. Korolev, A. A. Nikolskaya, N. O. Krivulin, A. I. Belov, A. N. Mikhaylov, D. A. Pavlov, D. I. Tetelbaum, N. A. Sobolev, M. Kumar, “Formation of hexagonal 9$R$ silicon polytype by ion implantation”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 43:16 (2017), 87–92; Tech. Phys. Lett., 43:8 (2017), 767–769
Citation in format AMSBIB
\Bibitem{KorNikKri17}
\by D.~S.~Korolev, A.~A.~Nikolskaya, N.~O.~Krivulin, A.~I.~Belov, A.~N.~Mikhaylov, D.~A.~Pavlov, D.~I.~Tetelbaum, N.~A.~Sobolev, M.~Kumar
\paper Formation of hexagonal 9$R$ silicon polytype by ion implantation
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2017
\vol 43
\issue 16
\pages 87--92
\mathnet{http://mi.mathnet.ru/pjtf6151}
\crossref{https://doi.org/10.21883/PJTF.2017.16.44937.16852}
\transl
\jour Tech. Phys. Lett.
\yr 2017
\vol 43
\issue 8
\pages 767--769
\crossref{https://doi.org/10.1134/S1063785017080211}
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    • This publication is cited in the following 9 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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