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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2017, Volume 43, Issue 1, Pages 80–88
DOI: https://doi.org/10.21883/PJTF.2017.01.44093.16031 (Mi pjtf6035) 		 
This article is cited in 6 scientific papers (total in 6 papers)

The effect of diborane additive on the plasma-chemical properties of deposited carbon films

E. N. Shubinaa, P. A. Karaseova, A. I. Titova, O. A. Podsvirova, A. Ya. Vinogradovb, N. N. Karasevc, A. V. Pozdnyakova

a Peter the Great St. Petersburg Polytechnic University
b Ioffe Institute, St. Petersburg
c St. Petersburg National Research University of Information Technologies, Mechanics and Optics
Full-text PDF (130 kB) Citations (6)
DOI: https://doi.org/10.21883/PJTF.2017.01.44093.16031
Abstract: We present the results of studies of the optical, electrical, and mechanical properties of diamondlike carbon films prepared by plasma-chemical vapor deposition from a mixture of methane and diborane in various proportions. Upon reaching the threshold concentration ($\sim$12%) of diborane in the mixture, inclusions of a new phase start to form in the structure of the films. This leads to nonlinear dependence of the interior stresses and the surface resistance of coatings on the composition of the mixture with minimum values corresponding to a diborane concentration of about 12%.
Received: 20.10.2015
Revised: 18.07.2016
English version:
Technical Physics Letters, 2017, Volume 43, Issue 1, Pages 81–84
DOI: https://doi.org/10.1134/S1063785017010114
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: E. N. Shubina, P. A. Karaseov, A. I. Titov, O. A. Podsvirov, A. Ya. Vinogradov, N. N. Karasev, A. V. Pozdnyakov, “The effect of diborane additive on the plasma-chemical properties of deposited carbon films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 43:1 (2017), 80–88; Tech. Phys. Lett., 43:1 (2017), 81–84
Citation in format AMSBIB
\Bibitem{ShuKarTit17}
\by E.~N.~Shubina, P.~A.~Karaseov, A.~I.~Titov, O.~A.~Podsvirov, A.~Ya.~Vinogradov, N.~N.~Karasev, A.~V.~Pozdnyakov
\paper The effect of diborane additive on the plasma-chemical properties of deposited carbon films
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2017
\vol 43
\issue 1
\pages 80--88
\mathnet{http://mi.mathnet.ru/pjtf6035}
\crossref{https://doi.org/10.21883/PJTF.2017.01.44093.16031}
\elib{https://elibrary.ru/item.asp?id=28949508}
\transl
\jour Tech. Phys. Lett.
\yr 2017
\vol 43
\issue 1
\pages 81--84
\crossref{https://doi.org/10.1134/S1063785017010114}
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    • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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