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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2017, Volume 43, Issue 2, Pages 38–44
DOI: https://doi.org/10.21883/PJTF.2017.02.44185.16385
(Mi pjtf6015)
 

This article is cited in 8 scientific papers (total in 8 papers)

A diffraction grating created in diamond substrate by boron ion implantation

A. L. Stepanovabc, V. I. Nuzhdina, M. F. Galyautdinova, N. V. Kurbatovaa, V. F. Valeeva, V. V. Vorobevb, Yu. N. Osinb

a Zavoisky Physical Technical Institute, Kazan Scientific Center of the Russian Academy of Sciences
b Kazan Federal University
c Kazan National Research Technological University
Full-text PDF (552 kB) Citations (8)
Abstract: This work is devoted to new method of manufacturing of diffractive optical elements (gratings). A grating was formed in a diamond substrate by implantation with boron ions through a mask. Ion implantation led to the graphitization of diamond in unmasked regions and resulted in swelling of the irradiated layer. The formation of periodic graphitized surface microstructures on the diamond substrate was confirmed by optical, electron, and atomic force microscopy. The efficiency of operation of the obtained diffractive optical element was demonstrated by probing with He–Ne laser radiation.
Received: 23.06.2016
English version:
Technical Physics Letters, 2017, Volume 43, Issue 1, Pages 104–106
DOI: https://doi.org/10.1134/S1063785017010266
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. L. Stepanov, V. I. Nuzhdin, M. F. Galyautdinov, N. V. Kurbatova, V. F. Valeev, V. V. Vorobev, Yu. N. Osin, “A diffraction grating created in diamond substrate by boron ion implantation”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 43:2 (2017), 38–44; Tech. Phys. Lett., 43:1 (2017), 104–106
Citation in format AMSBIB
\Bibitem{SteNuzGal17}
\by A.~L.~Stepanov, V.~I.~Nuzhdin, M.~F.~Galyautdinov, N.~V.~Kurbatova, V.~F.~Valeev, V.~V.~Vorobev, Yu.~N.~Osin
\paper A diffraction grating created in diamond substrate by boron ion implantation
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2017
\vol 43
\issue 2
\pages 38--44
\mathnet{http://mi.mathnet.ru/pjtf6015}
\crossref{https://doi.org/10.21883/PJTF.2017.02.44185.16385}
\elib{https://elibrary.ru/item.asp?id=28949515}
\transl
\jour Tech. Phys. Lett.
\yr 2017
\vol 43
\issue 1
\pages 104--106
\crossref{https://doi.org/10.1134/S1063785017010266}
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  • This publication is cited in the following 8 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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