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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2017, Volume 43, Issue 2, Pages 18–23
DOI: https://doi.org/10.21883/PJTF.2017.02.44182.16459 (Mi pjtf6012) 		 
This article is cited in 15 scientific papers (total in 15 papers)

Polishing superhard material surfaces with gas-cluster ion beams

A. E. Ieshkina, K. D. Kushkinaa, D. S. Kireeva, Yu. A. Ermakovb, V. S. Chernyshab

a Lomonosov Moscow State University
b Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics
Full-text PDF (444 kB) Citations (15)
DOI: https://doi.org/10.21883/PJTF.2017.02.44182.16459
Abstract: We have studied the influence of bombardment with accelerated gas-cluster ions on the surface topography of silicon carbide and diamond. Atomic-force microscopy shows that exposure to 10-keV gas-cluster ions at a total dose above 10$^{16}$ cm$^{-2}$ leads to smoothing of the surface relief. The ion-etching rate and efficiency of the surface relief smoothing as dependent on the thickness of removed layer have been estimated. Raman-spectroscopy data show that surface irradiation with gas-cluster ions does not introduce defects into the crystalline structure of irradiated material.
Received: 16.08.2016
English version:
Technical Physics Letters, 2017, Volume 43, Issue 1, Pages 95–97
DOI: https://doi.org/10.1134/S1063785017010205
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. E. Ieshkin, K. D. Kushkina, D. S. Kireev, Yu. A. Ermakov, V. S. Chernysh, “Polishing superhard material surfaces with gas-cluster ion beams”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 43:2 (2017), 18–23; Tech. Phys. Lett., 43:1 (2017), 95–97
Citation in format AMSBIB
\Bibitem{IesKusKir17}
\by A.~E.~Ieshkin, K.~D.~Kushkina, D.~S.~Kireev, Yu.~A.~Ermakov, V.~S.~Chernysh
\paper Polishing superhard material surfaces with gas-cluster ion beams
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2017
\vol 43
\issue 2
\pages 18--23
\mathnet{http://mi.mathnet.ru/pjtf6012}
\crossref{https://doi.org/10.21883/PJTF.2017.02.44182.16459}
\elib{https://elibrary.ru/item.asp?id=28949512}
\transl
\jour Tech. Phys. Lett.
\yr 2017
\vol 43
\issue 1
\pages 95--97
\crossref{https://doi.org/10.1134/S1063785017010205}
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    • This publication is cited in the following 15 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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