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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2017, Volume 43, Issue 5, Pages 60–67
DOI: https://doi.org/10.21883/PJTF.2017.05.44363.16508 (Mi pjtf5980) 		 
This article is cited in 10 scientific papers (total in 10 papers)

Monitoring of elastic stresses with optical system for measuring the substrate curvature in growth of III–N heterostructures by molecular-beam epitaxy

D. S. Zolotukhin, D. V. Nechaev, S. V. Ivanov, V. N. Zhmerik

Ioffe Institute, St. Petersburg
Full-text PDF (333 kB) Citations (10)
DOI: https://doi.org/10.21883/PJTF.2017.05.44363.16508
Abstract: An original optical system for measuring substrate curvature (OSMSC) is described. The system enables a high-precision analysis of the processes of generation and relaxation of elastic stresses in growth of heterostructures (HSs) based on nitride compounds III–N by plasma-assisted molecular-beam epitaxy (PA-MBE). The application of OSMSC to analyze the growth of GaN/AlN/Si(111) HSs made it possible not only to observe in detail the variation dynamics of elastic stresses in this structure in its metal-enriched growth by low-temperature PA-MBE, but also to develop an HS design eliminating the effect of layer cracking by controlling the compressive stresses.
Received: 28.09.2016
English version:
Technical Physics Letters, 2017, Volume 43, Issue 3, Pages 262–266
DOI: https://doi.org/10.1134/S1063785017030130
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. S. Zolotukhin, D. V. Nechaev, S. V. Ivanov, V. N. Zhmerik, “Monitoring of elastic stresses with optical system for measuring the substrate curvature in growth of III–N heterostructures by molecular-beam epitaxy”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 43:5 (2017), 60–67; Tech. Phys. Lett., 43:3 (2017), 262–266
Citation in format AMSBIB
\Bibitem{ZolNecIva17}
\by D.~S.~Zolotukhin, D.~V.~Nechaev, S.~V.~Ivanov, V.~N.~Zhmerik
\paper Monitoring of elastic stresses with optical system for measuring the substrate curvature in growth of III--N heterostructures by molecular-beam epitaxy
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2017
\vol 43
\issue 5
\pages 60--67
\mathnet{http://mi.mathnet.ru/pjtf5980}
\crossref{https://doi.org/10.21883/PJTF.2017.05.44363.16508}
\elib{https://elibrary.ru/item.asp?id=28997216}
\transl
\jour Tech. Phys. Lett.
\yr 2017
\vol 43
\issue 3
\pages 262--266
\crossref{https://doi.org/10.1134/S1063785017030130}
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    • This publication is cited in the following 10 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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