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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 44, Issue 8, Pages 11–19
DOI: https://doi.org/10.21883/PJTF.2018.08.45961.17020 (Mi pjtf5825) 		 
This article is cited in 1 scientific paper (total in 1 paper)

A new limitation of the depth resolution in tof-sims elemental profiling: the influence of a probing ion beam

M. N. Drozdova, Yu. N. Drozdova, A. V. Novikovab, P. A. Yuninab, D. V. Yurasova

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b National Research Lobachevsky State University of Nizhny Novgorod
Full-text PDF (125 kB) Citations (1)
DOI: https://doi.org/10.21883/PJTF.2018.08.45961.17020
Abstract: New data concerning the influence of a probing beam of bismuth ions on the depth resolution in elemental depth profiling by secondary ion mass spectrometry (SIMS) have been obtained on a TOF.SIMS-5 system using the principle of two separate ion beams. It is established that the existing criterion of nondestructive character of the probing beam, on which this principle is based, is insufficient. Additional processes must be taken into account so as to formulate a more adequate criterion. A regime of depth profiling is proposed that allows the depth resolution to be improved at low energies of sputtering ions.
Funding agency Grant number
Russian Foundation for Basic Research 15-02-02947
Received: 30.08.2017
English version:
Technical Physics Letters, 2018, Volume 44, Issue 4, Pages 320–323
DOI: https://doi.org/10.1134/S1063785018040181
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: M. N. Drozdov, Yu. N. Drozdov, A. V. Novikov, P. A. Yunin, D. V. Yurasov, “A new limitation of the depth resolution in tof-sims elemental profiling: the influence of a probing ion beam”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 44:8 (2018), 11–19; Tech. Phys. Lett., 44:4 (2018), 320–323
Citation in format AMSBIB
\Bibitem{DroDroNov18}
\by M.~N.~Drozdov, Yu.~N.~Drozdov, A.~V.~Novikov, P.~A.~Yunin, D.~V.~Yurasov
\paper A new limitation of the depth resolution in tof-sims elemental profiling: the influence of a probing ion beam
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 44
\issue 8
\pages 11--19
\mathnet{http://mi.mathnet.ru/pjtf5825}
\crossref{https://doi.org/10.21883/PJTF.2018.08.45961.17020}
\elib{https://elibrary.ru/item.asp?id=32740257}
\transl
\jour Tech. Phys. Lett.
\yr 2018
\vol 44
\issue 4
\pages 320--323
\crossref{https://doi.org/10.1134/S1063785018040181}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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