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This article is cited in 8 scientific papers (total in 8 papers)
Local oscillations of silicon–silicon bonds in silicon nitride
V. A. Volodinab, V. A. Gritsenkoabc, A. Chind a Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
b Novosibirsk State University
c Novosibirsk State Technical University
d National Chiao Tung University, Hsinchu, Taiwan, Republic of China
Abstract:
Raman spectra of films of nearly stoichiometric amorphous silicon nitride ($a$-Si$_{3}$N$_{4}$) reveal a contribution due to local oscillations of silicon–silicon (Si–Si) bonds. This observation directly confirms that the almost stoichiometric $a$-Si$_{3}$N$_{4}$ contains Si–Si bonds, which, according to theoretical predictions, act as electron and hole traps that are responsible for the memory effect in Si$_{3}$N$_{4}$.
Received: 05.02.2018
Citation:
V. A. Volodin, V. A. Gritsenko, A. Chin, “Local oscillations of silicon–silicon bonds in silicon nitride”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 44:10 (2018), 37–45; Tech. Phys. Lett., 44:5 (2018), 424–427
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https://www.mathnet.ru/eng/pjtf5803 https://www.mathnet.ru/eng/pjtf/v44/i10/p37
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