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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 44, Issue 14, Pages 19–25
DOI: https://doi.org/10.21883/PJTF.2018.14.46340.17146 (Mi pjtf5745) 		 
This article is cited in 2 scientific papers (total in 2 papers)

Zinc diffusion into InP via a narrow gap from a planar Zn$_{3}$P$_{2}$-based source

M. O. Petrushkov, M. A. Putyato, I. B. Chistokhin, B. R. Semyagin, E. A. Emelyanov, M. Yu. Yesin, T. A. Gavrilova, A. V. Vasev, V. V. Preobrazhenskii

Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
Full-text PDF (190 kB) Citations (2)
DOI: https://doi.org/10.21883/PJTF.2018.14.46340.17146
Abstract: An original technology of zinc diffusion into InP via a narrow gap is described, which allows reproducible formation of $p$–$n$ junctions with preset depth of doping and retained surface morphology of the doped layers. Using the proposed method, desired charge carrier distribution profiles in Zn-doped InP layers were obtained. It has been experimentally confirmed that the method of cross-sectional scanning electron microscopy allows to precision measure of the zinc diffusion depth.
Funding agency Grant number
Russian Science Foundation 16-12-00023
Received: 08.12.2017
English version:
Technical Physics Letters, 2018, Volume 44, Issue 7, Pages 612–614
DOI: https://doi.org/10.1134/S1063785018070258
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: M. O. Petrushkov, M. A. Putyato, I. B. Chistokhin, B. R. Semyagin, E. A. Emelyanov, M. Yu. Yesin, T. A. Gavrilova, A. V. Vasev, V. V. Preobrazhenskii, “Zinc diffusion into InP via a narrow gap from a planar Zn$_{3}$P$_{2}$-based source”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 44:14 (2018), 19–25; Tech. Phys. Lett., 44:7 (2018), 612–614
Citation in format AMSBIB
\Bibitem{PetPutChi18}
\by M.~O.~Petrushkov, M.~A.~Putyato, I.~B.~Chistokhin, B.~R.~Semyagin, E.~A.~Emelyanov, M.~Yu.~Yesin, T.~A.~Gavrilova, A.~V.~Vasev, V.~V.~Preobrazhenskii
\paper Zinc diffusion into InP via a narrow gap from a planar Zn$_{3}$P$_{2}$-based source
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 44
\issue 14
\pages 19--25
\mathnet{http://mi.mathnet.ru/pjtf5745}
\crossref{https://doi.org/10.21883/PJTF.2018.14.46340.17146}
\elib{https://elibrary.ru/item.asp?id=35270669}
\transl
\jour Tech. Phys. Lett.
\yr 2018
\vol 44
\issue 7
\pages 612--614
\crossref{https://doi.org/10.1134/S1063785018070258}
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    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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