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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 44, Issue 15, Pages 87–92
DOI: https://doi.org/10.21883/PJTF.2018.15.46445.17281 (Mi pjtf5740) 		 
This article is cited in 7 scientific papers (total in 7 papers)

Creating lithographic pictures using faceted zinc oxide microparticles on a silicon substrate

A. A. Bobkovab, I. A. Proninab, V. A. Moshnikovab, N. D. Yakushovaa, A. A. Karmanova, I. A. Averina, P. A. Somovb, E. I. Terukovc

a Penza State University
b Saint Petersburg Electrotechnical University "LETI"
c Ioffe Institute, St. Petersburg
Full-text PDF (145 kB) Citations (7)
DOI: https://doi.org/10.21883/PJTF.2018.15.46445.17281
Abstract: Lithography techniques compatible with silicon technology have been developed within the hydrothermal method. Topological layouts were formed by faceted microcrystals with the developed surface. The prospects for implementing new hierarchical structures are of special interest.
Funding agency Grant number
Russian Science Foundation 17-79-20239
Ministry of Education and Science of the Russian Federation СП-84.2018.1
16.897.2017/4.6
Russian Foundation for Basic Research МК-1882.2018.8
Received: 07.03.2018
English version:
Technical Physics Letters, 2018, Volume 44, Issue 8, Pages 694–696
DOI: https://doi.org/10.1134/S1063785018080047
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. A. Bobkov, I. A. Pronin, V. A. Moshnikov, N. D. Yakushova, A. A. Karmanov, I. A. Averin, P. A. Somov, E. I. Terukov, “Creating lithographic pictures using faceted zinc oxide microparticles on a silicon substrate”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 44:15 (2018), 87–92; Tech. Phys. Lett., 44:8 (2018), 694–696
Citation in format AMSBIB
\Bibitem{BobProMos18}
\by A.~A.~Bobkov, I.~A.~Pronin, V.~A.~Moshnikov, N.~D.~Yakushova, A.~A.~Karmanov, I.~A.~Averin, P.~A.~Somov, E.~I.~Terukov
\paper Creating lithographic pictures using faceted zinc oxide microparticles on a silicon substrate
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 44
\issue 15
\pages 87--92
\mathnet{http://mi.mathnet.ru/pjtf5740}
\crossref{https://doi.org/10.21883/PJTF.2018.15.46445.17281}
\elib{https://elibrary.ru/item.asp?id=35270693}
\transl
\jour Tech. Phys. Lett.
\yr 2018
\vol 44
\issue 8
\pages 694--696
\crossref{https://doi.org/10.1134/S1063785018080047}
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  • https://www.mathnet.ru/eng/pjtf/v44/i15/p87
    • This publication is cited in the following 7 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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