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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 44, Issue 20, Pages 53–61
DOI: https://doi.org/10.21883/PJTF.2018.20.46806.17452 (Mi pjtf5666) 		 
This article is cited in 1 scientific paper (total in 1 paper)

Asymmetry of the defect structure of semipolar GaN grown on Si(001)

A. E. Kalmykov, A. V. Myasoedov, L. M. Sorokin

Ioffe Institute, St. Petersburg
Full-text PDF (445 kB) Citations (1)
DOI: https://doi.org/10.21883/PJTF.2018.20.46806.17452
Abstract: The defect structure of a thick ($\sim$15 $\mu$m) semipolar gallium nitride (GaN) layer grown by hydride–chloride vapor phase epitaxy on a Si(001) substrate with buffer layers has been studied by transmission electron microscopy. The asymmetry of the defect structure of GaN epilayer has been revealed and analyzed. The influence of this asymmetry on the rate of decrease in the density of threading dislocations in the growing epitaxial layer is discussed.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation RFMEFI62117X0018
Received: 05.07.2018
English version:
Technical Physics Letters, 2018, Volume 44, Issue 10, Pages 926–929
DOI: https://doi.org/10.1134/S1063785018100267
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. E. Kalmykov, A. V. Myasoedov, L. M. Sorokin, “Asymmetry of the defect structure of semipolar GaN grown on Si(001)”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 44:20 (2018), 53–61; Tech. Phys. Lett., 44:10 (2018), 926–929
Citation in format AMSBIB
\Bibitem{KalMyaSor18}
\by A.~E.~Kalmykov, A.~V.~Myasoedov, L.~M.~Sorokin
\paper Asymmetry of the defect structure of semipolar GaN grown on Si(001)
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 44
\issue 20
\pages 53--61
\mathnet{http://mi.mathnet.ru/pjtf5666}
\crossref{https://doi.org/10.21883/PJTF.2018.20.46806.17452}
\elib{https://elibrary.ru/item.asp?id=36905901}
\transl
\jour Tech. Phys. Lett.
\yr 2018
\vol 44
\issue 10
\pages 926--929
\crossref{https://doi.org/10.1134/S1063785018100267}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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