Pisma v Zhurnal Tekhnicheskoi Fiziki
RUS  ENG    JOURNALS   PEOPLE   ORGANISATIONS   CONFERENCES   SEMINARS   VIDEO LIBRARY   PACKAGE AMSBIB  
General information
Latest issue
Archive
Guidelines for authors

Search papers
Search references

RSS
Latest issue
Current issues
Archive issues
What is RSS


Pisma v Zhurnal Tekhnicheskoi Fiziki:
Year:
Volume:
Issue:
Page:
Find




Personal entry:
Login:
Password:
Save password
Enter
Forgotten password?
Register

Pisma v Zhurnal Tekhnicheskoi Fiziki, 2018, Volume 44, Issue 20, Pages 30–36
DOI: https://doi.org/10.21883/PJTF.2018.20.46803.17322 (Mi pjtf5663) 		 
This article is cited in 1 scientific paper (total in 1 paper)

The reliability of revealing threading dislocations in epitaxial films by structure-sensitive etching

A. S. Deryabin, L. V. Sokolov, E. M. Trukhanov, K. B. Fritzler

Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
Full-text PDF (855 kB) Citations (1)
DOI: https://doi.org/10.21883/PJTF.2018.20.46803.17322
Abstract: Correspondence between threading dislocations (TDs) in epitaxial films and the etch pits observed upon selective chemical etching of the samples was studied in Ge/Si(001) heterostructures. It is established that the density of TDs revealed in epitaxial films with thicknesses $h\le 1$ $\mu$m can be significantly understated because of insufficient resolution of optical microscopy. Recommendations are given that increase the reliability of PD density estimation by means of structure-sensitive etching.
Received: 06.04.2018
English version:
Technical Physics Letters, 2018, Volume 44, Issue 10, Pages 916–918
DOI: https://doi.org/10.1134/S1063785018100218
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. S. Deryabin, L. V. Sokolov, E. M. Trukhanov, K. B. Fritzler, “The reliability of revealing threading dislocations in epitaxial films by structure-sensitive etching”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 44:20 (2018), 30–36; Tech. Phys. Lett., 44:10 (2018), 916–918
Citation in format AMSBIB
\Bibitem{DerSokTru18}
\by A.~S.~Deryabin, L.~V.~Sokolov, E.~M.~Trukhanov, K.~B.~Fritzler
\paper The reliability of revealing threading dislocations in epitaxial films by structure-sensitive etching
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2018
\vol 44
\issue 20
\pages 30--36
\mathnet{http://mi.mathnet.ru/pjtf5663}
\crossref{https://doi.org/10.21883/PJTF.2018.20.46803.17322}
\elib{https://elibrary.ru/item.asp?id=36905898}
\transl
\jour Tech. Phys. Lett.
\yr 2018
\vol 44
\issue 10
\pages 916--918
\crossref{https://doi.org/10.1134/S1063785018100218}
Linking options:
  • https://www.mathnet.ru/eng/pjtf5663
  • https://www.mathnet.ru/eng/pjtf/v44/i20/p30
    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
    Statistics & downloads:
    Abstract page:36
    Full-text PDF :8
     
      Contact us:
    		  Terms of Use  Registration to the website  Logotypes © Steklov Mathematical Institute RAS, 2024