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This article is cited in 4 scientific papers (total in 4 papers)
Formation of a nanophase wetting layer and metal growth on a semiconductor
N. I. Plusnin Institute for Automation and Control Processes, Far Eastern Branch of the Russian Academy of Sciences, Vladivostok
Abstract:
Based on the data on the atomic density of a film and degree of its homogeneity during the formation of the interface between 3$d$ transition metals (Cr, Co, Fe, or Cu) and silicon, a new concept of forming a contact between a reactive metal and a semiconductor has been justified. According to this concept, the low-temperature vapor-phase deposition of a metal onto a semiconductor is accompanied by the formation of a two-dimensional nanophase wetting layer of a metal or its mixture with silicon with a thickness of several monolayers, which significantly affects the interface formation and structure. This concept changes a perspective of forming a contact between a metal and a semiconductor substrate: it is necessary to take into account not only the formation of surface phases and clusters and/or the mixing process, but also the effect of elastic wetting of a substrate by the forming phases.
Received: 26.06.2018
Citation:
N. I. Plusnin, “Formation of a nanophase wetting layer and metal growth on a semiconductor”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 44:21 (2018), 64–72; Tech. Phys. Lett., 44:11 (2018), 980–983
Linking options:
https://www.mathnet.ru/eng/pjtf5653 https://www.mathnet.ru/eng/pjtf/v44/i21/p64
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Abstract page: | 28 | Full-text PDF : | 8 |
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