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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 2, Pages 50–54
DOI: https://doi.org/10.21883/PJTF.2019.02.47225.17557 (Mi pjtf5570) 		 
This article is cited in 6 scientific papers (total in 6 papers)

A new approach to tof-sims analysis of the phase composition of carbon-containing materials

M. N. Drozdova, Yu. N. Drozdova, A. I. Okhapkina, S. A. Kraeva, M. A. Lobaevb

a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod
Full-text PDF (210 kB) Citations (6)
DOI: https://doi.org/10.21883/PJTF.2019.02.47225.17557
Abstract: New possibilities offered by the method of secondary ion mass spectrometry (SIMS) for analysis of the phase composition of carbon-containing materials are considered. Differences are established between the mass spectra of three carbon phases: diamond, diamond-like carbon (DLC), and graphite. A simple algorithm for the quantitative determination of different phases in two-phase systems diamond–graphite and DLC–graphite is proposed that is based on the measurement of relative intensities of secondary cluster ions such as C$_{8}$/C$_{5}$ and CsC$_{8}$/CsC$_{4}$. It is shown that nonuniform depth profiles of various carbon phases are formed in diamond structures upon laser cutting and in DLC structures upon thermal annealing.
Funding agency Grant number
Russian Foundation for Basic Research 18-02-00565
Russian Science Foundation 17-19-01580
Received: 11.10.2018
English version:
Technical Physics Letters, 2019, Volume 45, Issue 1, Pages 48–52
DOI: https://doi.org/10.1134/S1063785019010231
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: M. N. Drozdov, Yu. N. Drozdov, A. I. Okhapkin, S. A. Kraev, M. A. Lobaev, “A new approach to tof-sims analysis of the phase composition of carbon-containing materials”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:2 (2019), 50–54; Tech. Phys. Lett., 45:1 (2019), 48–52
Citation in format AMSBIB
\Bibitem{DroDroOkh19}
\by M.~N.~Drozdov, Yu.~N.~Drozdov, A.~I.~Okhapkin, S.~A.~Kraev, M.~A.~Lobaev
\paper A new approach to tof-sims analysis of the phase composition of carbon-containing materials
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 45
\issue 2
\pages 50--54
\mathnet{http://mi.mathnet.ru/pjtf5570}
\crossref{https://doi.org/10.21883/PJTF.2019.02.47225.17557}
\elib{https://elibrary.ru/item.asp?id=37481281}
\transl
\jour Tech. Phys. Lett.
\yr 2019
\vol 45
\issue 1
\pages 48--52
\crossref{https://doi.org/10.1134/S1063785019010231}
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    • This publication is cited in the following 6 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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