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This article is cited in 6 scientific papers (total in 6 papers)
A new approach to tof-sims analysis of the phase composition of carbon-containing materials
M. N. Drozdova, Yu. N. Drozdova, A. I. Okhapkina, S. A. Kraeva, M. A. Lobaevb a Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
b Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod
Abstract:
New possibilities offered by the method of secondary ion mass spectrometry (SIMS) for analysis of the phase composition of carbon-containing materials are considered. Differences are established between the mass spectra of three carbon phases: diamond, diamond-like carbon (DLC), and graphite. A simple algorithm for the quantitative determination of different phases in two-phase systems diamond–graphite and DLC–graphite is proposed that is based on the measurement of relative intensities of secondary cluster ions such as C$_{8}$/C$_{5}$ and CsC$_{8}$/CsC$_{4}$. It is shown that nonuniform depth profiles of various carbon phases are formed in diamond structures upon laser cutting and in DLC structures upon thermal annealing.
Received: 11.10.2018
Citation:
M. N. Drozdov, Yu. N. Drozdov, A. I. Okhapkin, S. A. Kraev, M. A. Lobaev, “A new approach to tof-sims analysis of the phase composition of carbon-containing materials”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:2 (2019), 50–54; Tech. Phys. Lett., 45:1 (2019), 48–52
Linking options:
https://www.mathnet.ru/eng/pjtf5570 https://www.mathnet.ru/eng/pjtf/v45/i2/p50
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