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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 2, Pages 39–42
DOI: https://doi.org/10.21883/PJTF.2019.02.47222.17563 (Mi pjtf5567) 		 
This article is cited in 3 scientific papers (total in 3 papers)

Experimental observation of the confinement of atomic collision cascades during ion sputtering of porous silicon

A. E. Ieshkina, A. B. Tolstoguzovbcd, S. E. Svyakhovskiia, M. N. Drozdove, V. O. Pelenovichd

a Lomonosov Moscow State University
b Ryazan State Radio Engineering University
c Centre for Physics and Technological Research (CeFITec), Dept. de Física da Faculdade de Ciências e Tecnologia, Universidade Nova de Lisboa, Caparica, Portugal
d Key Laboratory of Artificial Micro- and Nanostructures of Ministry of Education and Hubei Key Laboratory of Nuclear Solid Physics, School of Physics and Technology, Wuhan University, Wuhan, China
e Institute for Physics of Microstructures, Russian Academy of Sciences, Nizhnii Novgorod
Full-text PDF (963 kB) Citations (3)
DOI: https://doi.org/10.21883/PJTF.2019.02.47222.17563
Abstract: Results of investigation of the mass spectra of secondary ions sputtered from bulk (continuous) and porous silicon targets with various characteristic core particle dimensions are presented. It has been established that the sputtering of nanostructured Si samples leads to a significant increase in the relative yield of massive cluster ions. This effect is especially pronounced when the characteristic nanoparticle size approaches the range of bombarding ions in the Si target. The obtained results are explained taking into account the confinement of atomic collision cascades.
Funding agency Grant number
Russian Foundation for Basic Research 18-02-00565
16-02-01100
Received: 16.10.2018
English version:
Technical Physics Letters, 2019, Volume 45, Issue 1, Pages 37–40
DOI: https://doi.org/10.1134/S1063785019010267
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. E. Ieshkin, A. B. Tolstoguzov, S. E. Svyakhovskii, M. N. Drozdov, V. O. Pelenovich, “Experimental observation of the confinement of atomic collision cascades during ion sputtering of porous silicon”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:2 (2019), 39–42; Tech. Phys. Lett., 45:1 (2019), 37–40
Citation in format AMSBIB
\Bibitem{IesTolSvy19}
\by A.~E.~Ieshkin, A.~B.~Tolstoguzov, S.~E.~Svyakhovskii, M.~N.~Drozdov, V.~O.~Pelenovich
\paper Experimental observation of the confinement of atomic collision cascades during ion sputtering of porous silicon
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 45
\issue 2
\pages 39--42
\mathnet{http://mi.mathnet.ru/pjtf5567}
\crossref{https://doi.org/10.21883/PJTF.2019.02.47222.17563}
\elib{https://elibrary.ru/item.asp?id=37481278}
\transl
\jour Tech. Phys. Lett.
\yr 2019
\vol 45
\issue 1
\pages 37--40
\crossref{https://doi.org/10.1134/S1063785019010267}
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    • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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