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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 3, Pages 30–33
DOI: https://doi.org/10.21883/PJTF.2019.03.47269.17585 (Mi pjtf5548) 		 
This article is cited in 10 scientific papers (total in 10 papers)

Contraction of microwave discharge in the reactor for chemical vapor deposition of diamond

S. A. Bogdanov, A. M. Gorbachev, D. B. Radishev, A. L. Vikharev, M. A. Lobaev

Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod
Full-text PDF (524 kB) Citations (10)
DOI: https://doi.org/10.21883/PJTF.2019.03.47269.17585
Abstract: It was found that in a hydrogen-methane mixture in microwave plasma reactor for diamond deposition, there is a threshold pressure after which the contraction of microwave discharge occurs. The results of measurements of gas temperature and spatial distributions of optical emission intensity of discharge are presented. The mechanism of discharge contraction is discussed.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 0035-2014-0002
Received: 12.11.2018
English version:
Technical Physics Letters, 2019, Volume 45, Issue 2, Pages 89–92
DOI: https://doi.org/10.1134/S1063785019020032
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: S. A. Bogdanov, A. M. Gorbachev, D. B. Radishev, A. L. Vikharev, M. A. Lobaev, “Contraction of microwave discharge in the reactor for chemical vapor deposition of diamond”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:3 (2019), 30–33; Tech. Phys. Lett., 45:2 (2019), 89–92
Citation in format AMSBIB
\Bibitem{BogGorRad19}
\by S.~A.~Bogdanov, A.~M.~Gorbachev, D.~B.~Radishev, A.~L.~Vikharev, M.~A.~Lobaev
\paper Contraction of microwave discharge in the reactor for chemical vapor deposition of diamond
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 45
\issue 3
\pages 30--33
\mathnet{http://mi.mathnet.ru/pjtf5548}
\crossref{https://doi.org/10.21883/PJTF.2019.03.47269.17585}
\elib{https://elibrary.ru/item.asp?id=37481308}
\transl
\jour Tech. Phys. Lett.
\yr 2019
\vol 45
\issue 2
\pages 89--92
\crossref{https://doi.org/10.1134/S1063785019020032}
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    • This publication is cited in the following 10 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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