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This article is cited in 10 scientific papers (total in 10 papers)
Contraction of microwave discharge in the reactor for chemical vapor deposition of diamond
S. A. Bogdanov, A. M. Gorbachev, D. B. Radishev, A. L. Vikharev, M. A. Lobaev Institute of Applied Physics, Russian Academy of Sciences, Nizhny Novgorod
Abstract:
It was found that in a hydrogen-methane mixture in microwave plasma reactor for diamond deposition, there is a threshold pressure after which the contraction of microwave discharge occurs. The results of measurements of gas temperature and spatial distributions of optical emission intensity of discharge are presented. The mechanism of discharge contraction is discussed.
Received: 12.11.2018
Citation:
S. A. Bogdanov, A. M. Gorbachev, D. B. Radishev, A. L. Vikharev, M. A. Lobaev, “Contraction of microwave discharge in the reactor for chemical vapor deposition of diamond”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:3 (2019), 30–33; Tech. Phys. Lett., 45:2 (2019), 89–92
Linking options:
https://www.mathnet.ru/eng/pjtf5548 https://www.mathnet.ru/eng/pjtf/v45/i3/p30
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Abstract page: | 37 | Full-text PDF : | 14 |
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