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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 6, Pages 30–32
DOI: https://doi.org/10.21883/PJTF.2019.06.47496.17646 (Mi pjtf5496) 		 
This article is cited in 17 scientific papers (total in 17 papers)

Finishing surface treatment of potassium titanyl phosphate single crystals by argon cluster ions

N. G. Korobeishchikov, I. V. Nikolaev, M. A. Roenko

Novosibirsk State University
Full-text PDF (687 kB) Citations (17)
DOI: https://doi.org/10.21883/PJTF.2019.06.47496.17646
Abstract: It is demonstrated that a argon cluster ion beam can be used for the finishing treatment of ultrasmooth surfaces (with initial root-mean-square roughness below 0.3 nm) of potassium titanyl phosphate single crystals. Analysis of the power spectral density function of surface roughness showed that cluster-ion irradiation leads to removal of residual chemical contaminations from the subsurface layer and produces additional smoothing of the crystal surface in a broad range of spatial frequencies ($\nu$ = 0.2–100 $\mu$m$^{-1}$).
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 11.1402.2017
Russian Foundation for Basic Research 17-01-00512/17
Received: 14.12.2018
Revised: 14.12.2018
Accepted: 21.12.2018
English version:
Technical Physics Letters, 2019, Volume 45, Issue 3, Pages 274–277
DOI: https://doi.org/10.1134/S1063785019030295
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: N. G. Korobeishchikov, I. V. Nikolaev, M. A. Roenko, “Finishing surface treatment of potassium titanyl phosphate single crystals by argon cluster ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:6 (2019), 30–32; Tech. Phys. Lett., 45:3 (2019), 274–277
Citation in format AMSBIB
\Bibitem{KorNikRoe19}
\by N.~G.~Korobeishchikov, I.~V.~Nikolaev, M.~A.~Roenko
\paper Finishing surface treatment of potassium titanyl phosphate single crystals by argon cluster ions
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 45
\issue 6
\pages 30--32
\mathnet{http://mi.mathnet.ru/pjtf5496}
\crossref{https://doi.org/10.21883/PJTF.2019.06.47496.17646}
\elib{https://elibrary.ru/item.asp?id=37481366}
\transl
\jour Tech. Phys. Lett.
\yr 2019
\vol 45
\issue 3
\pages 274--277
\crossref{https://doi.org/10.1134/S1063785019030295}
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    • This publication is cited in the following 17 articles:
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