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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 6, Pages 3–6
DOI: https://doi.org/10.21883/PJTF.2019.06.47488.17628 (Mi pjtf5488) 		 
This article is cited in 7 scientific papers (total in 7 papers)

Studying the composition and phase state of thin PZT films obtained by high-frequency magnetron sputtering under variation of working gas pressure

D. M. Dolginseva, V. P. Pronina, E. Yu. Kaptelovab, S. V. Senkevichab, I. P. Proninab

a Herzen State Pedagogical University of Russia, St. Petersburg
b Ioffe Institute, St. Petersburg
Full-text PDF (329 kB) Citations (7)
DOI: https://doi.org/10.21883/PJTF.2019.06.47488.17628
Abstract: Variation of the working gas pressure (from 8 to 2 Pa) during RF magnetron sputtering deposition of thin perovskite lead zirconate titanate (PZT) films revealed strong changes in their lead content, which decreased below the stoichiometric level and led to the formation of a two-phase (perovskite–pyrochlore) structure upon subsequent high-temperature annealing. Measurements of the composition of perovskite islands in the two-phase films showed that the lead content in these islands was equal to or greater than stoichiometric. These results lead to the conclusion that the obtained PZT films are free of lead vacancies.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 16.2811.2017/4.6
Russian Foundation for Basic Research 16-02-00632а
Received: 06.12.2018
Revised: 06.12.2018
Accepted: 11.12.2018
English version:
Technical Physics Letters, 2019, Volume 45, Issue 3, Pages 246–249
DOI: https://doi.org/10.1134/S1063785019030258
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. M. Dolginsev, V. P. Pronin, E. Yu. Kaptelov, S. V. Senkevich, I. P. Pronin, “Studying the composition and phase state of thin PZT films obtained by high-frequency magnetron sputtering under variation of working gas pressure”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:6 (2019), 3–6; Tech. Phys. Lett., 45:3 (2019), 246–249
Citation in format AMSBIB
\Bibitem{DolProKap19}
\by D.~M.~Dolginsev, V.~P.~Pronin, E.~Yu.~Kaptelov, S.~V.~Senkevich, I.~P.~Pronin
\paper Studying the composition and phase state of thin PZT films obtained by high-frequency magnetron sputtering under variation of working gas pressure
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 45
\issue 6
\pages 3--6
\mathnet{http://mi.mathnet.ru/pjtf5488}
\crossref{https://doi.org/10.21883/PJTF.2019.06.47488.17628}
\elib{https://elibrary.ru/item.asp?id=37481356}
\transl
\jour Tech. Phys. Lett.
\yr 2019
\vol 45
\issue 3
\pages 246--249
\crossref{https://doi.org/10.1134/S1063785019030258}
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    • This publication is cited in the following 7 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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