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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 9, Pages 26–29
DOI: https://doi.org/10.21883/PJTF.2019.09.47709.17722 (Mi pjtf5449) 		 
Features of pulsed laser annealing of ВС$_{3}$ films on sapphire substrate

V. Yu. Fominskiya, R. I. Romanova, A. Solovieva, I. S. Vasil'evskiia, D. A. Safonova, A. A. Ivanova, P. V. Zininb, V. P. Filonenkoc

a National Engineering Physics Institute "MEPhI", Moscow
b Scientific and Technological Centre of Unique Instrumentation, Russian Academy of Sciences
c Institute for High Pressure Physics, Russian Academy of Sciences
Full-text PDF (369 kB)
DOI: https://doi.org/10.21883/PJTF.2019.09.47709.17722
Abstract: The morphology, chemical composition, microstructure and electrical properties of ВС$_{3}$ thin films subjected to melting by a nanosecond laser pulse were investigated. The original films were formed by pulsed laser co-deposition of B and C on a sapphire substrate at 150 and 350$^{\circ}$C. Morphological changes in the films depended on their initial structure. However, the structure “frozen” after irradiation in both films was attributed to the B-saturated graphite-like phase, the local composition of which varied due to the formation of inclusions of amorphous boron carbide. Before and after irradiation, the films showed a weakly decreasing dependence of the sheet resistance with increasing temperature from 4.2 to 330 K. After pulsed laser irradiation, the sheet resistance of the films decreased by $\sim$2.6 times.
Funding agency Grant number
Russian Science Foundation 17-12-01535
Ministry of Education and Science of the Russian Federation 3.4639.2017/6.7
Received: 01.02.2019
Revised: 01.02.2019
Accepted: 13.02.2019
English version:
Technical Physics Letters, 2019, Volume 45, Issue 5, Pages 446–449
DOI: https://doi.org/10.1134/S1063785019050055
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. Yu. Fominskiy, R. I. Romanov, A. Soloviev, I. S. Vasil'evskii, D. A. Safonov, A. A. Ivanov, P. V. Zinin, V. P. Filonenko, “Features of pulsed laser annealing of ВС$_{3}$ films on sapphire substrate”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:9 (2019), 26–29; Tech. Phys. Lett., 45:5 (2019), 446–449
Citation in format AMSBIB
\Bibitem{FomRomSol19}
\by V.~Yu.~Fominskiy, R.~I.~Romanov, A.~Soloviev, I.~S.~Vasil'evskii, D.~A.~Safonov, A.~A.~Ivanov, P.~V.~Zinin, V.~P.~Filonenko
\paper Features of pulsed laser annealing of ВС$_{3}$ films on sapphire substrate
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 45
\issue 9
\pages 26--29
\mathnet{http://mi.mathnet.ru/pjtf5449}
\crossref{https://doi.org/10.21883/PJTF.2019.09.47709.17722}
\elib{https://elibrary.ru/item.asp?id=39133926}
\transl
\jour Tech. Phys. Lett.
\yr 2019
\vol 45
\issue 5
\pages 446--449
\crossref{https://doi.org/10.1134/S1063785019050055}
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