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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 13, Pages 44–47
DOI: https://doi.org/10.21883/PJTF.2019.13.47958.17743 (Mi pjtf5395) 		 
This article is cited in 2 scientific papers (total in 2 papers)

Assessing the thickness of thin films based on elemental data composition of film structures

Yu. M. Nikolaenko, A. S. Korneevets, N. B. Efros, V. V. Burkhovetskiy, I. Yu. Reshidova

O O Galkin Donetsk Institute for Physics and Engineering, National Academy of Sciences of Ukraine
Full-text PDF (109 kB) Citations (2)
DOI: https://doi.org/10.21883/PJTF.2019.13.47958.17743
Abstract: We demonstrate the possibility of a quantitative assessment of the thickness of thin films using to measurements of the cationic composition of film structures using the INCA Energy-350 energy dispersion spectrometer that is part of the JSM-6490 LV electron microscope (Japan). The use of this method is especially useful if it is impossible to provide sufficient contrast between the images of the film and substrate sections obtained with a scanning electron microscope on a transverse cleavage of the film structure.
Keywords: scanning electron microscope, energy dispersive X-ray spectrometer, nanosized films, magnetron sputtering method of targets.
Received: 21.02.2019
Revised: 08.04.2019
Accepted: 11.04.2019
English version:
Technical Physics Letters, 2019, Volume 45, Issue 7, Pages 679–682
DOI: https://doi.org/10.1134/S1063785019070083
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: Yu. M. Nikolaenko, A. S. Korneevets, N. B. Efros, V. V. Burkhovetskiy, I. Yu. Reshidova, “Assessing the thickness of thin films based on elemental data composition of film structures”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:13 (2019), 44–47; Tech. Phys. Lett., 45:7 (2019), 679–682
Citation in format AMSBIB
\Bibitem{NikKorEfr19}
\by Yu.~M.~Nikolaenko, A.~S.~Korneevets, N.~B.~Efros, V.~V.~Burkhovetskiy, I.~Yu.~Reshidova
\paper Assessing the thickness of thin films based on elemental data composition of film structures
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 45
\issue 13
\pages 44--47
\mathnet{http://mi.mathnet.ru/pjtf5395}
\crossref{https://doi.org/10.21883/PJTF.2019.13.47958.17743}
\elib{https://elibrary.ru/item.asp?id=41131106}
\transl
\jour Tech. Phys. Lett.
\yr 2019
\vol 45
\issue 7
\pages 679--682
\crossref{https://doi.org/10.1134/S1063785019070083}
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    • This publication is cited in the following 2 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
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