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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 16, Pages 41–44
DOI: https://doi.org/10.21883/PJTF.2019.16.48156.17873 (Mi pjtf5351) 		 
This article is cited in 1 scientific paper (total in 1 paper)

Peculiarities of the structure and properties of thin PZT films with strongly nonuniform depth–composition profiles

D. M. Dolginseva, M. V. Staritsynab, V. P. Pronina, E. Yu. Kaptelovac, S. V. Senkevichac, I. P. Proninca, S. A. Nemovd

a Herzen State Pedagogical University of Russia, St. Petersburg
b I.V. Gorynin Central Research Institute of Structural Materials Prometey, National Research Center Kurchatov Institute, St. Petersburg, Russia
c Ioffe Institute, St. Petersburg
d Peter the Great St. Petersburg Polytechnic University
Full-text PDF (322 kB) Citations (1)
DOI: https://doi.org/10.21883/PJTF.2019.16.48156.17873
Abstract: Two-layer thin films of lead zirconate titanate (PZT) with lead content in the layers differing by 20% were deposited by RF magnetron sputtering at variable working gas pressure in the system. The phase states, compositions, and dielectric properties of two-layer films obtained with different orders of layer deposition were compared. It is established that the order of deposition significantly influences the conditions of crystallization of the perovskite phase and unipolar properties of PZT films.
Keywords: RF magnetron sputtering, thin PZT films, inhomogeneous lead distribution on thickness.
Funding agency Grant number
Ministry of Education and Science of the Russian Federation 14.595.21.0004
16.2811.2017/4.6
Experimental part of this investigation was performed using instrumentation of the Center of Collective Use at the Central Research Institute of Structural Materials Prometey (St. Petersburg) and supported by the Ministry of Education and Science of the Russian Federation according to agreement no. 14.595.21.0004, unique identifier RFMEFI59517X0004. The work was partly supported by the Ministry for Education and Science of Russian Federation (Grant No 16.2811.2017/4.6).
Received: 08.05.2019
Revised: 08.05.2019
Accepted: 21.05.2019
English version:
Technical Physics Letters, 2019, Volume 45, Issue 8, Pages 839–842
DOI: https://doi.org/10.1134/S1063785019080200
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. M. Dolginsev, M. V. Staritsyn, V. P. Pronin, E. Yu. Kaptelov, S. V. Senkevich, I. P. Pronin, S. A. Nemov, “Peculiarities of the structure and properties of thin PZT films with strongly nonuniform depth–composition profiles”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:16 (2019), 41–44; Tech. Phys. Lett., 45:8 (2019), 839–842
Citation in format AMSBIB
\Bibitem{DolStaPro19}
\by D.~M.~Dolginsev, M.~V.~Staritsyn, V.~P.~Pronin, E.~Yu.~Kaptelov, S.~V.~Senkevich, I.~P.~Pronin, S.~A.~Nemov
\paper Peculiarities of the structure and properties of thin PZT films with strongly nonuniform depth--composition profiles
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 45
\issue 16
\pages 41--44
\mathnet{http://mi.mathnet.ru/pjtf5351}
\crossref{https://doi.org/10.21883/PJTF.2019.16.48156.17873}
\elib{https://elibrary.ru/item.asp?id=41131230}
\transl
\jour Tech. Phys. Lett.
\yr 2019
\vol 45
\issue 8
\pages 839--842
\crossref{https://doi.org/10.1134/S1063785019080200}
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    • This publication is cited in the following 1 articles:
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