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This article is cited in 1 scientific paper (total in 1 paper)
Peculiarities of the structure and properties of thin PZT films with strongly nonuniform depth–composition profiles
D. M. Dolginseva, M. V. Staritsynab, V. P. Pronina, E. Yu. Kaptelovac, S. V. Senkevichac, I. P. Proninca, S. A. Nemovd a Herzen State Pedagogical University of Russia, St. Petersburg
b I.V. Gorynin Central Research Institute of Structural Materials Prometey, National Research Center Kurchatov Institute, St. Petersburg, Russia
c Ioffe Institute, St. Petersburg
d Peter the Great St. Petersburg Polytechnic University
Abstract:
Two-layer thin films of lead zirconate titanate (PZT) with lead content in the layers differing by 20% were deposited by RF magnetron sputtering at variable working gas pressure in the system. The phase states, compositions, and dielectric properties of two-layer films obtained with different orders of layer deposition were compared. It is established that the order of deposition significantly influences the conditions of crystallization of the perovskite phase and unipolar properties of PZT films.
Keywords:
RF magnetron sputtering, thin PZT films, inhomogeneous lead distribution on thickness.
Received: 08.05.2019 Revised: 08.05.2019 Accepted: 21.05.2019
Citation:
D. M. Dolginsev, M. V. Staritsyn, V. P. Pronin, E. Yu. Kaptelov, S. V. Senkevich, I. P. Pronin, S. A. Nemov, “Peculiarities of the structure and properties of thin PZT films with strongly nonuniform depth–composition profiles”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:16 (2019), 41–44; Tech. Phys. Lett., 45:8 (2019), 839–842
Linking options:
https://www.mathnet.ru/eng/pjtf5351 https://www.mathnet.ru/eng/pjtf/v45/i16/p41
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