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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2019, Volume 45, Issue 20, Pages 36–38
DOI: https://doi.org/10.21883/PJTF.2019.20.48392.17949
(Mi pjtf5294)
 

This article is cited in 3 scientific papers (total in 3 papers)

Studying near-surface layers of germanium implanted with cobalt ions

V. V. Bazarova, V. A. Shustova, N. M. Lyadova, I. A. Faizrakhmanova, I. V. Yanilkinab, S. M. Khantimerova, R. R. Garipova, R. R. Fatykhova, N. M. Suleimanovca, V. F. Valeeva

a Zavoisky Physical Technical Institute, Kazan Scientific Center of the Russian Academy of Sciences
b Kazan (Volga Region) Federal University
c Kazan State Power Engineering University
Abstract: Results of an investigation of the surface of germanium nanostructured by means of ion implantation are presented. Single-crystalline germanium ($c$-Ge) plates were irradiated by 40-keV cobalt Co$^+$ ions in a dose range of (2 – 8) $\times$ 10$^{16}$ ion/cm$^2$. Evolution of the germanium surface morphology with increasing ion dose was studied by method of scanning electron microscopy. It is established that an increase in the ion implantation dose is accompanied by gradual formation of a surface layer consisting of spherical particles with diameters of $\sim$150 nm. Analysis of the X-ray diffraction patterns of samples was indicative of the appearance of nanosized cobalt germanide (CoGe) particles in the ion-implanted surface layer.
Keywords: nanostructured germanium, ion implantation, lithium ion batteries.
Funding agency Grant number
Russian Foundation for Basic Research 18-48-160027 р_а
Ministry of Education and Science of the Russian Federation
This study was supported in part by the Russian Foundation for Basic Research jointly with the Republic of Tatarstan, project no. 18-48-160027_r_a. The XRD study was supported by a state order to the Kazan Scientific Center of the Russian Academy of Sciences (Tatarstan).
Received: 26.06.2019
Revised: 26.06.2019
Accepted: 03.07.2019
English version:
Technical Physics Letters, 2019, Volume 45, Issue 10, Pages 1047–1049
DOI: https://doi.org/10.1134/S1063785019100183
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: V. V. Bazarov, V. A. Shustov, N. M. Lyadov, I. A. Faizrakhmanov, I. V. Yanilkin, S. M. Khantimerov, R. R. Garipov, R. R. Fatykhov, N. M. Suleimanov, V. F. Valeev, “Studying near-surface layers of germanium implanted with cobalt ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:20 (2019), 36–38; Tech. Phys. Lett., 45:10 (2019), 1047–1049
Citation in format AMSBIB
\Bibitem{BazShuLya19}
\by V.~V.~Bazarov, V.~A.~Shustov, N.~M.~Lyadov, I.~A.~Faizrakhmanov, I.~V.~Yanilkin, S.~M.~Khantimerov, R.~R.~Garipov, R.~R.~Fatykhov, N.~M.~Suleimanov, V.~F.~Valeev
\paper Studying near-surface layers of germanium implanted with cobalt ions
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2019
\vol 45
\issue 20
\pages 36--38
\mathnet{http://mi.mathnet.ru/pjtf5294}
\crossref{https://doi.org/10.21883/PJTF.2019.20.48392.17949}
\elib{https://elibrary.ru/item.asp?id=41300907}
\transl
\jour Tech. Phys. Lett.
\yr 2019
\vol 45
\issue 10
\pages 1047--1049
\crossref{https://doi.org/10.1134/S1063785019100183}
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  • This publication is cited in the following 3 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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