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This article is cited in 3 scientific papers (total in 3 papers)
InAlAs/InGaAs/InP high-electron-mobility transistors with a composite channel and higher breakdown characteristics
N. A. Maleevab, A. P. Vasil'evc, A. G. Kuz'menkovc, M. A. Bobrova, M. M. Kulaginaa, S. I. Troshkova, S. N. Maleeva, V. A. Belyakovd, E. V. Petryakovad, Yu. P. Kudryashovad, E. L. Fefelovad, I. V. Makartsevd, S. A. Blokhina, F. A. Akhmedove, A. V. Egorove, A. G. Fefelovd, V. M. Ustinovabc a Ioffe Institute, St. Petersburg
b Saint Petersburg Electrotechnical University "LETI"
c Submicron Heterostructures for Microelectronics Research and Engineering Center, Russian Academy of Sciences, St. Petersburg
d JSC "NPP Salyut", Nizhny Novgorod, Russia
e NPO TECHNOMASH, Moscow, Russia
Abstract:
A high-electron-mobility transistor (HEMT) based on InAlAs/InGaAs/InP heterostructures possessing higher breakdown characteristics is developed. An InGaAs composite channel structure, combined with completely selective forming of the double recess structure, is used in the devices. HEMTs with a $T$-shaped gate 120 nm in length consist of four fingers, each 30 $\mu$m in width, exhibit a maximum transconductance of 810 mS/mm, 460-mA/mm maximum density of drain current and 8- to 10-V drain-to-gate breackdown voltage. The current-amplification cut-off frequency of transistors is over 115 GHz. Due to the enhanced breakdown voltage and the forming of a double recess structure by selective etching, the elaborated transistors are promising for application in the monolithic integrated circuits of the millimeter-wave medium power amplifiers.
Keywords:
high-electron-mobility transistor, InP, breakdown voltage, millimeter wave amplifiers.
Received: 03.07.2019 Revised: 03.07.2019 Accepted: 11.07.2019
Citation:
N. A. Maleev, A. P. Vasil'ev, A. G. Kuz'menkov, M. A. Bobrov, M. M. Kulagina, S. I. Troshkov, S. N. Maleev, V. A. Belyakov, E. V. Petryakova, Yu. P. Kudryashova, E. L. Fefelova, I. V. Makartsev, S. A. Blokhin, F. A. Akhmedov, A. V. Egorov, A. G. Fefelov, V. M. Ustinov, “InAlAs/InGaAs/InP high-electron-mobility transistors with a composite channel and higher breakdown characteristics”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 45:21 (2019), 29–33; Tech. Phys. Lett., 45:11 (2019), 1092–1096
Linking options:
https://www.mathnet.ru/eng/pjtf5278 https://www.mathnet.ru/eng/pjtf/v45/i21/p29
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