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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2020, Volume 46, Issue 4, Pages 30–32
DOI: https://doi.org/10.21883/PJTF.2020.04.49047.18057 (Mi pjtf5184) 		 
This article is cited in 7 scientific papers (total in 7 papers)

Optical transparency of Zr–B–N films deposited by magnetron sputtering of ZrB$_{2}$ target

Ph. V. Kiryukhantsev-Korneev, E. A. Levashov

National University of Science and Technology «MISIS», Moscow
Full-text PDF (329 kB) Citations (7)
DOI: https://doi.org/10.21883/PJTF.2020.04.49047.18057
Abstract: Thin fims in the Zr–B–N system possessing optical transparency have been studied. It is established that increase in the volume fraction of nitrogen in the gas mixture and, hence, in the concentration of nitrogen in the coatings leads to an increase in their optical transmission due to the formation of a BN phase.
Keywords: Zr–B–N coatings, ZrB$_{2}$ cathode, magnetron sputtering, chemical composition, optical properties, transmittance, BN phase.
Funding agency Grant number
Russian Foundation for Basic Research 19-08-00187
This work was supported in part by the Russian Foundation for Basic Research, project no. 19-08-00187.
Received: 02.10.2019
Revised: 02.10.2019
Accepted: 15.11.2019
English version:
Technical Physics Letters, 2020, Volume 46, Issue 2, Pages 179–181
DOI: https://doi.org/10.1134/S1063785020020224
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: Ph. V. Kiryukhantsev-Korneev, E. A. Levashov, “Optical transparency of Zr–B–N films deposited by magnetron sputtering of ZrB$_{2}$ target”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:4 (2020), 30–32; Tech. Phys. Lett., 46:2 (2020), 179–181
Citation in format AMSBIB
\Bibitem{KirLev20}
\by Ph.~V.~Kiryukhantsev-Korneev, E.~A.~Levashov
\paper Optical transparency of Zr--B--N films deposited by magnetron sputtering of ZrB$_{2}$ target
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2020
\vol 46
\issue 4
\pages 30--32
\mathnet{http://mi.mathnet.ru/pjtf5184}
\crossref{https://doi.org/10.21883/PJTF.2020.04.49047.18057}
\elib{https://elibrary.ru/item.asp?id=42776918}
\transl
\jour Tech. Phys. Lett.
\yr 2020
\vol 46
\issue 2
\pages 179--181
\crossref{https://doi.org/10.1134/S1063785020020224}
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    • This publication is cited in the following 7 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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