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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2020, Volume 46, Issue 8, Pages 21–24
DOI: https://doi.org/10.21883/PJTF.2020.08.49303.18210
(Mi pjtf5128)
 

This article is cited in 1 scientific paper (total in 1 paper)

Thermal migration of melted zones over the silicon surface under thermal shock

A. A. Skvortsov, M. V. Koryachko, M. R. Rybakova

Moscow Polytechnic University
Full-text PDF (316 kB) Citations (1)
Abstract: In this paper, we examine the issues of the formation and propagation of melted zones during electric explosion of thin aluminum films on the oxidized silicon surface. A difference in the formation and propagation mechanisms of melted zones on the surface during the passage of a current pulse and after it was switched off is found. After the current pulse is switched off, the migration of melted zones is revealed to be determined by the temperature gradient near a local heat source. The temperature gradients are obtained from the dimensional dependence of the displacement rate, and the thermoelasticity coefficient that determines the dynamics of zone migration in the temperature gradient field is estimated.
Keywords: electric explosion, thin films, temperature gradient, semiconductor structure.
Funding agency Grant number
Russian Science Foundation 19-79-00372
This work was supported by the Russian Science Foundation, project no. 19-79-00372.
Received: 21.01.2020
Revised: 21.01.2020
Accepted: 24.01.2020
English version:
Technical Physics Letters, 2020, Volume 46, Issue 4, Pages 374–377
DOI: https://doi.org/10.1134/S1063785020040276
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. A. Skvortsov, M. V. Koryachko, M. R. Rybakova, “Thermal migration of melted zones over the silicon surface under thermal shock”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:8 (2020), 21–24; Tech. Phys. Lett., 46:4 (2020), 374–377
Citation in format AMSBIB
\Bibitem{SkvKorRyb20}
\by A.~A.~Skvortsov, M.~V.~Koryachko, M.~R.~Rybakova
\paper Thermal migration of melted zones over the silicon surface under thermal shock
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2020
\vol 46
\issue 8
\pages 21--24
\mathnet{http://mi.mathnet.ru/pjtf5128}
\crossref{https://doi.org/10.21883/PJTF.2020.08.49303.18210}
\elib{https://elibrary.ru/item.asp?id=43800660}
\transl
\jour Tech. Phys. Lett.
\yr 2020
\vol 46
\issue 4
\pages 374--377
\crossref{https://doi.org/10.1134/S1063785020040276}
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  • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
    Related articles in Google Scholar: Russian articles, English articles
    Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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