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This article is cited in 7 scientific papers (total in 7 papers)
Influence of target temperature on the formation of a nanorelief under irradiation with gas cluster ions
D. S. Kireeva, A. E. Ieshkina, A. A. Shemukhinb a Lomonosov Moscow State University
b Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics
Abstract:
A nanorelief forming on a copper surface under oblique irradiation with cluster ions has been examined at different irradiation doses and target temperatures. This nanorelief has been found to evolve into an ordered undulating structure. It has been demonstrated that the initial roughness is smoothed out at higher target temperatures. The mechanisms of formation of the surface topography have been identified, and their efficiency has been determined.
Keywords:
cluster ions, sputtering, nanorelief, self-organization, atomic force microscopy.
Received: 28.08.2019 Revised: 31.01.2020 Accepted: 06.02.2020
Citation:
D. S. Kireev, A. E. Ieshkin, A. A. Shemukhin, “Influence of target temperature on the formation of a nanorelief under irradiation with gas cluster ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:9 (2020), 3–6; Tech. Phys. Lett., 46:5 (2020), 409–412
Linking options:
https://www.mathnet.ru/eng/pjtf5109 https://www.mathnet.ru/eng/pjtf/v46/i9/p3
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