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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2020, Volume 46, Issue 9, Pages 3–6
DOI: https://doi.org/10.21883/PJTF.2020.09.49362.18021 (Mi pjtf5109) 		 
This article is cited in 7 scientific papers (total in 7 papers)

Influence of target temperature on the formation of a nanorelief under irradiation with gas cluster ions

D. S. Kireeva, A. E. Ieshkina, A. A. Shemukhinb

a Lomonosov Moscow State University
b Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics
Full-text PDF (1583 kB) Citations (7)
DOI: https://doi.org/10.21883/PJTF.2020.09.49362.18021
Abstract: A nanorelief forming on a copper surface under oblique irradiation with cluster ions has been examined at different irradiation doses and target temperatures. This nanorelief has been found to evolve into an ordered undulating structure. It has been demonstrated that the initial roughness is smoothed out at higher target temperatures. The mechanisms of formation of the surface topography have been identified, and their efficiency has been determined.
Keywords: cluster ions, sputtering, nanorelief, self-organization, atomic force microscopy.
Funding agency Grant number
Russian Foundation for Basic Research 18-32-20193
This study was supported by the Russian Foundation for Basic Research, project no. 18-32-20193.
Received: 28.08.2019
Revised: 31.01.2020
Accepted: 06.02.2020
English version:
Technical Physics Letters, 2020, Volume 46, Issue 5, Pages 409–412
DOI: https://doi.org/10.1134/S1063785020050065
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: D. S. Kireev, A. E. Ieshkin, A. A. Shemukhin, “Influence of target temperature on the formation of a nanorelief under irradiation with gas cluster ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:9 (2020), 3–6; Tech. Phys. Lett., 46:5 (2020), 409–412
Citation in format AMSBIB
\Bibitem{KirIesShe20}
\by D.~S.~Kireev, A.~E.~Ieshkin, A.~A.~Shemukhin
\paper Influence of target temperature on the formation of a nanorelief under irradiation with gas cluster ions
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2020
\vol 46
\issue 9
\pages 3--6
\mathnet{http://mi.mathnet.ru/pjtf5109}
\crossref{https://doi.org/10.21883/PJTF.2020.09.49362.18021}
\elib{https://elibrary.ru/item.asp?id=43800670}
\transl
\jour Tech. Phys. Lett.
\yr 2020
\vol 46
\issue 5
\pages 409--412
\crossref{https://doi.org/10.1134/S1063785020050065}
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    • This publication is cited in the following 7 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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