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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2020, Volume 46, Issue 10, Pages 21–24
DOI: https://doi.org/10.21883/PJTF.2020.10.49426.18141 (Mi pjtf5100) 		 
This article is cited in 1 scientific paper (total in 1 paper)

The effect of operating modes on the response of ammonia sensors based on tin dioxide films

A. V. Tsymbalov, V. M. Kalygina, N. K. Maksimova, E. V. Chernikov

Tomsk State University
Full-text PDF (103 kB) Citations (1)
DOI: https://doi.org/10.21883/PJTF.2020.10.49426.18141
Abstract: The influence of operating modes on the response of ammonia sensors based on tin dioxide films has been studied. Samples have been obtained as a result of high-frequency magnetron sputtering of a SnO$_2$:Sb target on sapphire substrates with predeposited Pt electrodes and a heater. Varying the heating cycle duration and reducing the cooling cycle temperature may increase the response by one or two orders of magnitude. The results are explained as being due to the change in the density of chemically adsorbed oxygen on the surface of the SnO$_2$:Sb film depending on the temperature regime.
Keywords: tin dioxide, ammonia, thin films, magnetron sputtering, thermal cycling mode.
Received: 04.12.2019
Revised: 22.02.2019
Accepted: 25.02.2019
English version:
Technical Physics Letters, 2020, Volume 46, Issue 5, Pages 480–483
DOI: https://doi.org/10.1134/S1063785020050284
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. V. Tsymbalov, V. M. Kalygina, N. K. Maksimova, E. V. Chernikov, “The effect of operating modes on the response of ammonia sensors based on tin dioxide films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:10 (2020), 21–24; Tech. Phys. Lett., 46:5 (2020), 480–483
Citation in format AMSBIB
\Bibitem{TsyKalMak20}
\by A.~V.~Tsymbalov, V.~M.~Kalygina, N.~K.~Maksimova, E.~V.~Chernikov
\paper The effect of operating modes on the response of ammonia sensors based on tin dioxide films
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2020
\vol 46
\issue 10
\pages 21--24
\mathnet{http://mi.mathnet.ru/pjtf5100}
\crossref{https://doi.org/10.21883/PJTF.2020.10.49426.18141}
\elib{https://elibrary.ru/item.asp?id=43800699}
\transl
\jour Tech. Phys. Lett.
\yr 2020
\vol 46
\issue 5
\pages 480--483
\crossref{https://doi.org/10.1134/S1063785020050284}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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