The influence of magnetron sputtering conditions on the structure of Zr–Pd coatings

Structureless Zr$_{75}$Pd$_{25}$ amorphous metal coatings were obtained using DC magnetron sputtering with an average deposition rate of 1.3 nm/s and a substrate temperature of 40$^\circ$C, as well as the crystalline coatings at a higher temperature. The equilibrium phase composition is observed at a temperature 350$^\circ$C. At intermediate temperature mainly the PdZr phase is formed against the equilibrium PdZr$_2$ phase. The roughness of the obtained amorphous coatings is of 0.2–0.5 nm, which is an order of magnitude lower than that of crystalline coatings of the same composition.