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This article is cited in 7 scientific papers (total in 7 papers)
The effect of the growth temperature on the passivating properties of the Al$_{2}$O$_{3}$ films formed by atomic layer deposition on the CdHgTe surface
D. V. Gorshkov, G. Yu. Sidorov, I. V. Sabinina, Yu. G. Sidorov, D. V. Marin, M. V. Yakushev Rzhanov Institute of Semiconductor Physics, Siberian Branch of Russian Academy of Sciences, Novosibirsk
Abstract:
The electrophysical interface properties of the passivating Al$_{2}$O$_{3}$ coating grown by the method of plasma-induced atomic layer deposition at various temperatures on MBE $p$-CdHgTe ($x$ = 0.22) was experimentally studied by measuring the capacitance-voltage characteristics of MIS structures. It was found that, at a temperature of Al$_{2}$O$_{3}$ growth of 200$^{\circ}$С in MCT, the concentration of acceptors increases due to dissociation. At a temperature of 80$^{\circ}$С, the spread in the capacitance of the dielectric and the built-in charge increases. The optimum growth temperature of the passivating Al$_{2}$O$_{3}$ coating on CdHgTe lies in the range of 120–160$^{\circ}$С.
Keywords:
CdHgTe, Al$_{2}$O$_{3}$, atomic layer deposition, $C$ – $V$, passivating coating.
Received: 20.04.2020 Revised: 20.04.2020 Accepted: 22.04.2020
Citation:
D. V. Gorshkov, G. Yu. Sidorov, I. V. Sabinina, Yu. G. Sidorov, D. V. Marin, M. V. Yakushev, “The effect of the growth temperature on the passivating properties of the Al$_{2}$O$_{3}$ films formed by atomic layer deposition on the CdHgTe surface”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:15 (2020), 14–17; Tech. Phys. Lett., 46:8 (2020), 741–744
Linking options:
https://www.mathnet.ru/eng/pjtf5029 https://www.mathnet.ru/eng/pjtf/v46/i15/p14
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