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This article is cited in 2 scientific papers (total in 2 papers)
Synthesis and gas sensitivity of thin chromium oxide films
A. V. Almaev, B. O. Kushnarev, E. V. Chernikov, V. А. Novikov Tomsk State University
Abstract:
Thin polycrystalline Cr$_{2}$O$_{3}$ films were obtained using RF magnetron sputtering followed by annealing in air at $T$ = 673 K. The obtained films had grain diameters within 40–70 nm and a bandgap width of 3.3 $\pm$ 0.2 eV. In a temperature range of 303–473 K, sensors based on these Cr$_{2}$O$_{3}$ films exhibited high response to NO$_2$, H$_2$, acetone and toluene vapors, while weakly responding to the presence of CH$_4$ and CO and showing relatively weak dependence of the electric resistance on air humidity. A qualitative model of the influence of gases on the electrical properties of thin Cr$_{2}$O$_{3}$ films is proposed.
Keywords:
chromium oxide, thin films, magnetron sputtering, gas sensors.
Received: 16.04.2020 Revised: 06.07.2020 Accepted: 20.07.2020
Citation:
A. V. Almaev, B. O. Kushnarev, E. V. Chernikov, V. А. Novikov, “Synthesis and gas sensitivity of thin chromium oxide films”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:20 (2020), 35–37; Tech. Phys. Lett., 46:10 (2020), 1028–1031
Linking options:
https://www.mathnet.ru/eng/pjtf4965 https://www.mathnet.ru/eng/pjtf/v46/i20/p35
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Abstract page: | 49 | Full-text PDF : | 18 |
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