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Pisma v Zhurnal Tekhnicheskoi Fiziki, 2020, Volume 46, Issue 23, Pages 29–32
DOI: https://doi.org/10.21883/PJTF.2020.23.50345.18423 (Mi pjtf4923) 		 
This article is cited in 1 scientific paper (total in 1 paper)

Influence of surface curvature on silicon sputtering by low-energy Ar ions

A. A. Sycheva

Lomonosov Moscow State University, Skobeltsyn Institute of Nuclear Physics
Full-text PDF (473 kB) Citations (1)
DOI: https://doi.org/10.21883/PJTF.2020.23.50345.18423
Abstract: Molecular dynamics (MD) method was used to study 200 eV Ar ion impact on silicon nanoparticles of various sizes. Based on the MD simulations, the analysis of sputtering mechanisms and differences in the ion energy deposition which are determined by the curvature of the target surface, is performed in the paper.
Keywords: physical sputtering, simulation, molecular dynamics, mechanism, surface curvature.
Funding agency Grant number
Russian Foundation for Basic Research 18-29-27001
This paper was supported by the Russian Foundation for Basic Research, project no. 18-29-27001.
Received: 15.06.2020
Revised: 18.08.2020
Accepted: 19.08.2020
English version:
Technical Physics Letters, 2020, Volume 46, Issue 12, Pages 1184–1187
DOI: https://doi.org/10.1134/S1063785020120135
Bibliographic databases:
Document Type: Article
Language: Russian
Citation: A. A. Sycheva, “Influence of surface curvature on silicon sputtering by low-energy Ar ions”, Pisma v Zhurnal Tekhnicheskoi Fiziki, 46:23 (2020), 29–32; Tech. Phys. Lett., 46:12 (2020), 1184–1187
Citation in format AMSBIB
\Bibitem{Syc20}
\by A.~A.~Sycheva
\paper Influence of surface curvature on silicon sputtering by low-energy Ar ions
\jour Pisma v Zhurnal Tekhnicheskoi Fiziki
\yr 2020
\vol 46
\issue 23
\pages 29--32
\mathnet{http://mi.mathnet.ru/pjtf4923}
\crossref{https://doi.org/10.21883/PJTF.2020.23.50345.18423}
\elib{https://elibrary.ru/item.asp?id=44574198}
\transl
\jour Tech. Phys. Lett.
\yr 2020
\vol 46
\issue 12
\pages 1184--1187
\crossref{https://doi.org/10.1134/S1063785020120135}
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    • This publication is cited in the following 1 articles:
    Citing articles in Google Scholar: Russian citations, English citations
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    		Pisma v Zhurnal Tekhnicheskoi Fiziki Pisma v Zhurnal Tekhnicheskoi Fiziki
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